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1. (WO2017130662) ARC EVAPORATION DEVICE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/130662 International Application No.: PCT/JP2017/000295
Publication Date: 03.08.2017 International Filing Date: 06.01.2017
IPC:
C23C 14/24 (2006.01) ,C23C 14/34 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
Applicants:
株式会社神戸製鋼所 KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.) [JP/JP]; 兵庫県神戸市中央区脇浜海岸通二丁目2番4号 2-4, Wakinohama-Kaigandori 2-chome, Chuo-ku, Kobe-shi, Hyogo 6518585, JP
Inventors:
藤井 博文 FUJII, Hirofumi; --
亀澤 英明 KAMEZAWA, Hideaki; --
谷藤 信一 TANIFUJI, Shinichi; --
白根 英樹 SHIRANE, Hideki; --
Agent:
小谷 悦司 KOTANI, Etsuji; JP
小谷 昌崇 KOTANI, Masataka; JP
村松 敏郎 MURAMATSU, Toshiro; JP
Priority Data:
2016-01230526.01.2016JP
Title (EN) ARC EVAPORATION DEVICE
(FR) DISPOSITIF D'ÉVAPORATION À ARC
(JA) アーク蒸発装置
Abstract:
(EN) Provided is an arc evaporation device that is capable of accurately detecting, over a long period of time, whether or not a target is present at a predetermined position. An arc evaporation device (1) is provided with: a bar-shaped target (3) that has a tip surface (3a) and a side surface (3b) continuous thereto and extending in the axis direction, and that is melted and evaporated from the tip surface (3a) by arc discharge; an arc power supply (8); a target feeding unit (4) for moving the target (3) along the axis direction, in the feeding direction in which the tip surface (3a) advances; an ignition rod (6) having a shape that is possible to allow contact with the side surface (3b) of the target (3) from the intersecting direction intersecting the feeding direction, at a predetermined position in the feeding direction of the target (3); a rotary actuator (7) for moving the ignition rod (6) to enter into a feed area where the target is going to be fed, along the intersecting direction from a retreat position away from the side surface (3b) in the intersecting direction; and a detection unit (9) for detecting whether or not the ignition rod (6) has made contact with the side surface (3b) of the target (3), during movement of the ignition rod (6).
(FR) L'invention concerne un dispositif d'évaporation à arc qui est capable de détecter de manière précise, sur une longue durée, si une cible est présente ou non en une position prédéterminée. Un dispositif d'évaporation à arc (1) selon l'invention comporte : une cible en forme de barre (3) qui présente une surface de pointe (3a) et une surface latérale (3b) continue par rapport à celle-ci et s'étendant dans la direction axiale, et qui est fondue et évaporée de la surface de pointe (3a) par une décharge à arc ; une alimentation électrique d'arc (8) ; une unité d'alimentation de cible (4) pour déplacer la cible (3) le long de la direction axiale, dans la direction d'alimentation dans laquelle la surface de pointe (3a) avance ; une tige d'allumage (6) ayant une forme qui permet le contact avec la surface latérale (3b) de la cible (3) depuis la direction d'intersection qui coupe la direction d'alimentation, en une position prédéterminée dans la direction d'alimentation de la cible (3) ; un actionneur rotatif (7) pour déplacer la tige d'allumage (6) afin qu'elle entre dans une zone d'alimentation où la cible doit être introduite, le long de la direction d'intersection depuis une position de retrait éloignée de la surface latérale (3b) dans la direction d'intersection ; et une unité de détection (9) destinée à détecter si la tige d'allumage (6) est entrée ou non en contact avec la surface latérale (3b) de la cible (3), pendant le mouvement de la tige d'allumage (6).
(JA) ターゲットが所定の位置に存在するか否かの検出を長期に亘って正確に行うことが可能なアーク蒸発装置を提供する。アーク蒸発装置(1)は、先端面(3a)およびそれに連続して軸方向に延びる側面(3b)を有し、アーク放電によって先端面(3a)から溶解して蒸発する棒状のターゲット(3)と、アーク電源(8)と、ターゲット(3)を先端面(3a)が前進する送り方向で軸方向に沿って移動させるターゲット送り部(4)と、ターゲット(3)の送り方向における所定の位置において、ターゲット(3)の側面(3b)に対して送り方向と交差する交差方向から接触可能な形状を有する点火ロッド(6)と、点火ロッド(6)を側面(3b)から交差方向に離れた退避位置から交差方向に沿ってターゲット(3)が送り込まれる搬送領域へ進入するように移動させるロータリアクチュエータ(7)と、点火ロッド(6)の移動中において、点火ロッド(6)がターゲット(3)の側面(3b)に接触したか否かを検出する検出部(9)とを備えている。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
CN108495948EP3388547BR112018015304US20190024228