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1. (WO2017130396) CONVEYANCE DEVICE AND WASHING DEVICE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/130396 International Application No.: PCT/JP2016/052757
Publication Date: 03.08.2017 International Filing Date: 29.01.2016
IPC:
H01L 21/304 (2006.01) ,B08B 3/02 (2006.01) ,H01L 21/677 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
04
the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18
the devices having semiconductor bodies comprising elements of the fourth group of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
30
Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20-H01L21/26142
302
to change the physical characteristics of their surfaces, or to change their shape, e.g. etching, polishing, cutting
304
Mechanical treatment, e.g. grinding, polishing, cutting
B PERFORMING OPERATIONS; TRANSPORTING
08
CLEANING
B
CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
3
Cleaning by methods involving the use or presence of liquid or steam
02
Cleaning by the force of jets or sprays
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
Applicants:
堺ディスプレイプロダクト株式会社 SAKAI DISPLAY PRODUCTS CORPORATION [JP/JP]; 大阪府堺市堺区匠町1番地 1, Takumicho, Sakai-ku, Sakai-shi, Osaka 5908522, JP
Inventors:
仲谷 知眞 NAKATANI, Tomochika; JP
Agent:
河野 英仁 KOHNO, Hideto; JP
Priority Data:
Title (EN) CONVEYANCE DEVICE AND WASHING DEVICE
(FR) DISPOSITIF DE TRANSPORT ET DISPOSITIF DE LAVAGE
(JA) 搬送装置及び洗浄装置
Abstract:
(EN) Provided are a conveyance device and a washing device that, when washing a glass substrate while conveying the same at a slant, can steadily convey the glass substrate. A conveyance device according to the present invention comprises a first frame, a second frame that is provided in a higher location that the first frame and is substantially parallel to the first frame, and a plurality of conveyance rollers that are axle-suspended between the first frame and the second frame, said conveyance rollers each having a surface that is formed from an elastic body and having a diameter expansion section on one end side, said end side being on the first frame side, in which diameter expansion section the diameter of the roller gradually expands toward said one end.
(FR) L'invention concerne un dispositif de transport et un dispositif de lavage qui, lors du lavage d'un substrat de verre tout en transportant celui-ci en pente, peuvent transporter de manière régulière le substrat de verre. Un dispositif de transport selon la présente invention comprend un premier cadre, un second cadre qui est disposé à un endroit plus élevé que le premier cadre et est sensiblement parallèle à la première trame, et une pluralité de rouleaux de transport qui sont suspendus sur essieu entre le premier cadre et le second cadre, lesdits rouleaux de transport possédant chacun une surface qui est formée à partir d'un corps élastique et ayant une section d'expansion de diamètre sur un premier côté d'extrémité, ledit premier côté d'extrémité se trouvant sur le côté premier cadre, dans laquelle section d'expansion de diamètre le diamètre du rouleau augmente progressivement vers ladite première extrémité.
(JA)  ガラス基板を傾斜させて搬送しつつ洗浄するに際し、ガラス基板を安定的に搬送することができる搬送装置及び洗浄装置を提供する。 本開示の搬送装置は、第1のフレームと、第1のフレームよりも高い位置に第1のフレームと略平行をなして設けられた第2のフレームと、第1のフレーム及び第2のフレームに軸架され表面が弾性体で形成されており、第1フレーム側の一端側に、該一端に向けて徐々に拡径された拡径部を有する複数の搬送ローラとを備える。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
CN108604545US20190035661