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1. (WO2017112395) TEMPERATURE CONTROLLED ION SOURCE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/112395 International Application No.: PCT/US2016/064936
Publication Date: 29.06.2017 International Filing Date: 05.12.2016
IPC:
H01J 37/317 (2006.01) ,H01J 37/08 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
30
Electron-beam or ion-beam tubes for localised treatment of objects
317
for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
04
Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
08
Ion sources; Ion guns
Applicants:
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. [US/US]; 35 Dory Road Gloucester, Massachusetts 01930, US
Inventors:
HOLDEN, Scott C.; US
KOO, Bon-Woong; US
BINNS, Brant S.; US
WHITE, Richard M.; US
STARKS, Kenneth L.; US
COBB, Eric R.; US
Agent:
NIELDS, LEMACK & FRAME, LLC; 176 E. Main Street Suite 5 Westboro, Massachusetts 01581, US
FRAME, Robert C.; US
LEMACK, Kevin S.; US
Priority Data:
14/977,72022.12.2015US
Title (EN) TEMPERATURE CONTROLLED ION SOURCE
(FR) SOURCE D'IONS À TEMPÉRATURE RÉGULÉE
Abstract:
(EN) An ion source with improved temperature control is disclosed. A portion of the ion source is nestled within a recessed cavity in a heat sink, where the portion of the ion source and the recessed cavity are each shaped so that expansion of the ion source causes high pressure thermal contact with the heat sink. For example, the ion source may have a tapered cylindrical end, which fits within a recessed cavity in the heat sink. Thermal expansion of the ion source causes the tapered cylindrical end to press against the recessed cavity in the heat sink. By proper selection of the temperature of the heat sink, the temperature and flow of coolant fluid through the heat sink, and the size of the gap between the heat sink and the ion source, the temperature of the ion source can be controlled.
(FR) L'invention concerne une source d'ions à régulation de température améliorée. Une partie de la source d'ions est nichée dans une cavité renfoncée dans un dissipateur thermique, ladite partie et ladite cavité étant chacune formée de sorte que la dilatation de la source d'ions entraîne un contact thermique haute pression avec le dissipateur thermique. Par exemple, la source d'ions peut comporter une extrémité cylindrique conique qui s'ajuste à l'intérieur de la cavité renfoncée dans le dissipateur thermique. La dilatation thermique de la source d'ions entraîne l'extrémité cylindrique conique à appuyer contre la cavité renfoncée dans le dissipateur thermique. La température de la source d'ions peut être régulée par sélection appropriée de la température du dissipateur thermique, de la température et de l'écoulement de fluide de refroidissement à travers le dissipateur thermique et de la taille de l'espace entre le dissipateur thermique et la source d'ions.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
CN108475609KR1020180088464