Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2017110467) SUBSTRATE SUCTIONING DEVICE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/110467 International Application No.: PCT/JP2016/086321
Publication Date: 29.06.2017 International Filing Date: 07.12.2016
IPC:
H01L 21/683 (2006.01) ,B23Q 3/08 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
Q
DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL, CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
3
Devices holding, supporting, or positioning, work or tools, of a kind normally removable from the machine
02
for mounting on a work-table, tool-slide, or analogous part
06
Work-clamping means
08
other than mechanically-actuated
Applicants:
三星ダイヤモンド工業株式会社 MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. [JP/JP]; 大阪府摂津市香露園32番12号 32-12 Koroen, Settsu city, Osaka 5660034, JP
Inventors:
堀井 良吾 HORII, Ryogo; JP
野崎 正和 NOZAKI, Masakazu; JP
Agent:
新樹グローバル・アイピー特許業務法人 SHINJYU GLOBAL IP; 大阪府大阪市北区南森町1丁目4番19号 サウスホレストビル South Forest Bldg., 1-4-19, Minamimori-machi, Kita-ku, Osaka-shi, Osaka 5300054, JP
Priority Data:
2015-25329725.12.2015JP
Title (EN) SUBSTRATE SUCTIONING DEVICE
(FR) DISPOSITIF D'ASPIRATION DE SUBSTRAT
(JA) 基板吸着装置
Abstract:
(EN) The present invention stably suctions and holds a deflected substrate of various types onto a worktable. This substrate suctioning device 30 can be attached into and detached from a plurality of holes 15b formed in a worktable 10. The substrate suctioning device 30 is provided with: a flange member 31; a cylinder 32; and a coil spring 33. The flange member 31 has therein an accommodating portion 31a open upwardly, has, in the bottom of the accommodating portion 31a, a connection hole 31c connected to a suction source, and can be attached into and detached from the holes 15b of the worktable 10. The cylinder 32 is arranged in the accommodating portion 31a of the flange member 31 so as to be movable in the up/down direction within a predetermined range, and has a suction hole 32a penetrating therethrough in the up/down direction. The coil spring 33 biases the cylinder 32 upward such that the upper end surface of the cylinder 32 protrudes, by a predetermined amount, from a placement surface of the worktable 10.
(FR) L'article de l'invention aspire de manière stable et retient, sur une table de travail, divers types de substrat déviés. Ce dispositif d'aspiration de substrat (30) se fixe par insertion dans ou s'extrait de plusieurs trous (15b) formés dans une table de travail (10). Le dispositif d'aspiration de substrat (30) est muni d'un élément bride (31); d'un cylindre (32); et d'un ressort hélicoïdal (33). L'élément bride (31) comprend une partie logement (31a) ouverte en haut et présentant, dans sa partie inférieure, un trou de raccordement (31c) relié à une source d'aspiration, ledit élément bride se fixant par insertion dans ou s'extrayant des trous (15b) de la table de travail (10). Le cylindre (32) est disposé dans la partie logement (31a) de l'élément bride (31) de façon à se déplacer verticalement sur une distance prédéterminée; il est traversé d'un trou d'aspiration (32a) vertical. Le ressort hélicoïdal (33) sollicite le cylindre (32) vers le haut de sorte que la surface d'extrémité supérieure du cylindre (32) fait saillie, d'un volume prédéterminé, d'une surface de placement de la table de travail (10).
(JA) たわみのある種々の基板に対して、基板を安定してワークテーブルに吸着保持する。この基板吸着装置30は、ワークテーブル10に形成された複数の孔15bに着脱可能である。基板吸着装置30は、フランジ部材31と、シリンダ32と、コイルスプリング33と、を備えている。フランジ部材31は、上方に開口する収容部31aを内部に有するとともに、収容部31aの底部に吸着源に連通する連通孔31cを有し、ワークテーブル10の孔15bに着脱可能である。シリンダ32は、フランジ部材31の収容部31aに所定の範囲で上下動自在に配置され、上下に貫通する吸引孔32aを内部に有する。コイルスプリング33は、シリンダ32を、シリンダ32の上端面がワークテーブル10の載置面から所定量だけ突出するようにシリンダ32上方に付勢する。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
CN108431944EP3396708