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1. WO2017100118 - METHOD OF COATING BOTH SIDES OF A SUBSTRATE

Publication Number WO/2017/100118
Publication Date 15.06.2017
International Application No. PCT/US2016/064905
International Filing Date 05.12.2016
IPC
C23C 14/56 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
C03C 17/00 2006.1
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
CCHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
17Surface treatment of glass, e.g. of devitrified glass, not in the form of fibres or filaments, by coating
CPC
C03C 17/002
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
17Surface treatment of glass, not in the form of fibres or filaments, by coating
001General methods for coating; Devices therefor
002for flat glass, e.g. float glass
C03C 2218/33
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
2218Methods for coating glass
30Aspects of methods for coating glass not covered above
32After-treatment
328Partly or completely removing a coating
33by etching
C03C 2218/355
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
2218Methods for coating glass
30Aspects of methods for coating glass not covered above
355Temporary coating
C03C 2218/365
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
2218Methods for coating glass
30Aspects of methods for coating glass not covered above
365Coating different sides of a glass substrate
C23C 14/0676
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
0676Oxynitrides
C23C 14/086
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
08Oxides
086of zinc, germanium, cadmium, indium, tin, thallium or bismuth
Applicants
  • CARDINAL CG COMPANY [US]/[US]
Inventors
  • MYLI, Kari B.
  • PFAFF, Gary L.
  • BURROWS, Keith James
  • SCHWEISS, Dylan
Agents
  • FAIRBAIRN, Kara K.
  • GINZBURG, Michael
  • HIPKINS, Thomas R.
  • KADIEVITCH, Natalie D.
  • LAVANWAY, JR., Paul J.
  • PARZYCH, John S.
  • RAHLIN, Katherine J.
  • SEGELBAUM, Charles D.
  • SNUSTAD, Eric J.
  • SPANHEIMER, Ryan M.
  • WEST, David C.
  • BUSS, Eric
  • GANESAN, Krithiga
Priority Data
62/266,31711.12.2015US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHOD OF COATING BOTH SIDES OF A SUBSTRATE
(FR) PROCÉDÉ DE REVÊTEMENT BILATÉRAL D'UN SUBSTRAT
Abstract
(EN)
A method of depositing coating onto both sides of a substrate comprising the sequential steps of -providing a substrate having a first surface and a second surface, -providing a production line comprising a series of sputtering chambers and a plurality of transport rollers for conveying the substrate along the production line, the series of sputtering chambers comprising one or more upper targets positioned above the plurality of transport rollers and one or more lower targets positioned beneath the plurality of transport rollers, -positioning the substrate on the production line such that the first surface is oriented toward said one or more upper targets and the second surface contacts two or more of the plurality of transport rollers, -upwardly sputtering said one or more lower targets to deposit a sacrificial coating onto the second surface and downwardly sputtering said one or more upper targets to deposit a first functional coating onto the first surface, -positioning the substrate on the production line such that the second surface is oriented toward said one or more upper targets and the first surface contacts two or more of the plurality of transport rollers, -removing the sacrificial coating from the second surface while leaving intact the first functional coating on the first surface and -downwardly sputtering said one or more upper targets to deposit a second functional coating onto the second surface.
(FR)
L'invention concerne un procédé permettant de déposer un revêtement sur les deux côtés d'un substrat comprenant les étapes séquentielles consistant - à fournir un substrat ayant une première surface et une seconde surface, - à fournir une ligne de production comprenant une série de chambres de pulvérisation et une pluralité de rouleaux de transport pour transporter le substrat le long de la ligne de production, la série de chambres de pulvérisation comprenant une ou plusieurs cibles supérieures positionnées au-dessus de la pluralité de rouleaux de transport et une ou plusieurs cibles inférieures positionnées au-dessous de la pluralité de rouleaux de transport, - à positionner le substrat sur la ligne de production, de sorte que la première surface est orientée vers lesdites une ou plusieurs cibles supérieures et la seconde surface vient en contact avec au moins deux de la pluralité de rouleaux de transport, - à pulvériser vers le haut ladite ou lesdites cibles inférieures afin de déposer une couche sacrificielle sur la seconde surface et pulvériser vers le bas ladite ou lesdites cibles supérieures pour déposer une première couche fonctionnelle sur la première surface, - à positionner le substrat sur la ligne de production, de sorte que la seconde surface est orientée vers ladite ou lesdites cibles supérieures et la première surface est en contact avec au moins deux de la pluralité de rouleaux de transport, - à éliminer la couche sacrificielle de la seconde surface sans toucher à la première couche fonctionnelle sur la première surface et - à pulvériser vers le bas ladite ou lesdites cibles supérieures pour déposer une seconde couche fonctionnelle sur la seconde surface.
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