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1. (WO2017099849) MICROELECTROMECHANICAL MICROPHONE HAVING A STATIONARY INNER REGION
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/099849 International Application No.: PCT/US2016/042609
Publication Date: 15.06.2017 International Filing Date: 15.07.2016
IPC:
H04R 19/00 (2006.01) ,H04R 7/24 (2006.01) ,H04R 19/04 (2006.01) ,H04R 31/00 (2006.01) ,B81B 3/00 (2006.01)
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
19
Electrostatic transducers
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
7
Diaphragms for electromechanical transducers; Cones
16
Mounting or tensioning of diaphragms or cones
24
Tensioning by means acting directly on free portion of diaphragm or cone
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
19
Electrostatic transducers
04
Microphones
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
31
Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
3
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Applicants:
INVENSENSE, INC. [US/US]; 1745 Technology Drive San Jose, California 95110, US
Inventors:
BERGER, Renata Melamud; US
BHARATAN, Sushil; US
CHEN, Thomas; US
Agent:
JOSHI, Vinay; US
Priority Data:
14/962,18208.12.2015US
Title (EN) MICROELECTROMECHANICAL MICROPHONE HAVING A STATIONARY INNER REGION
(FR) MICROPHONE MICROÉLECTROMÉCANIQUE À RÉGION INTÉRIEURE FIXE
Abstract:
(EN) A microelectromechanical microphone has a stationary region or another type of mechanically supported region that can mitigate or avoid mechanical instabilities in the microelectromechanical microphone. The stationary region can be formed in a diaphragm of the microelectromechanical microphone by rigidly attaching, via a rigid dielectric member, an inner portion of the diaphragm to a backplate of the microelectromechanical microphone. The rigid dielectric member can extend between the backplate and the diaphragm. In certain embodiments, the dielectric member can be hollow, forming a shell that is centrosymmetric or has another type of symmetry. In other embodiments, the dielectric member can define a core-shell structure, where an outer shell of a first dielectric material defines an inner opening filled with a second dielectric material. Multiple dielectric members can rigidly attach the diaphragm to the backplate. An extended dielectric member can rigidly attach a non-planar diaphragm to a backplate.
(FR) La présente invention concerne un microphone microélectromécanique présentant une région fixe ou un autre type de région soutenue mécaniquement qui peut atténuer ou éviter des instabilités mécaniques dans le microphone microélectromécanique. La région fixe peut être formée dans une membrane du microphone microélectromécanique par fixation rigide, par l'intermédiaire d'un élément diélectrique rigide, d'une partie intérieure de la membrane à une plaque arrière du microphone microélectromécanique. L'élément diélectrique rigide peut s'étendre entre la plaque arrière et la membrane. Dans certains modes de réalisation, l'élément diélectrique peut être creux, formant une enveloppe centrosymétrique ou présentant un autre type de symétrie. Dans d'autres modes de réalisation, l'élément diélectrique peut définir une structure noyau-enveloppe, une enveloppe extérieure d'un premier matériau diélectrique définissant une ouverture intérieure remplie d'un second matériau diélectrique. Plusieurs éléments diélectriques peuvent fixer solidement la membrane à la plaque arrière. Un élément diélectrique étendu peut fixer solidement une membrane non plane à une plaque arrière.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
CN108141678EP3387843