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1. (WO2017099221) DISCHARGE LAMP AND METHOD FOR EXCHANGING SAME, AND EXPOSURE METHOD AND DEVICE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/099221 International Application No.: PCT/JP2016/086730
Publication Date: 15.06.2017 International Filing Date: 09.12.2016
IPC:
G03F 7/20 (2006.01) ,H01J 61/50 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
61
Gas-discharge or vapour-discharge lamps
02
Details
50
Auxiliary parts or solid material within the envelope for reducing risk of explosion upon breakage of the envelope, e.g. for use in mines
Applicants:
株式会社ニコン NIKON CORPORATION [JP/JP]; 東京都港区港南二丁目15番3号 15-3, Konan 2-chome, Minato-ku, Tokyo 1086290, JP
Inventors:
青木 保夫 AOKI Yasuo; JP
Agent:
永井 冬紀 NAGAI, Fuyuki; JP
Priority Data:
2015-24010109.12.2015JP
Title (EN) DISCHARGE LAMP AND METHOD FOR EXCHANGING SAME, AND EXPOSURE METHOD AND DEVICE
(FR) LAMPE À DÉCHARGE ET SON PROCÉDÉ DE REMPLACEMENT, ET PROCÉDÉ ET DISPOSITIF D'EXPOSITION
(JA) 放電ランプ及びその交換方法、並びに露光方法及び装置
Abstract:
(EN) A discharge lamp is provided with a glass tube having an electrode for forming a light-emitting part provided therein, and a base provided at the end part of the glass tube. A light source device is provided with an emission unit for beaming a light beam into the through hole of the base of the discharge lamp, a light-receiving unit for detecting the light beam having passed through the through hole, and a light source control system for obtaining the angle of the discharge lamp using the result of the detection by the light-receiving unit. States of the discharge lamp, such as the rotation angle or whether or not the discharge lamp has already been used, can be easily verified.
(FR) L'invention concerne une lampe à décharge pourvue d'un tube de verre renfermant une électrode destinée à former une partie d'émission de lumière, muni à sa partie d'extrémité d'un culot. Un dispositif source de lumière est pourvu d'une unité d'émission destinée à projeter un faisceau lumineux dans le trou traversant du culot de la lampe à décharge, d'une unité de réception de lumière destinée à détecter le faisceau lumineux qui a traversé le trou traversant, et d'un système de commande de source de lumière destiné à obtenir l'angle de la lampe à décharge à partir du résultat de la détection par l'unité de réception de lumière. L'invention permet de vérifier facilement certains états de la lampe à décharge, notamment son angle de rotation ou si elle a déjà été utilisée ou non.
(JA) 放電ランプは、発光部を形成するための電極が内部に設けられたガラス管と、そのガラス管の端部に設けられた口金部と、を備え、口金部に開口よりなる貫通孔が設けられている。光源装置は、放電ランプの口金部の貫通孔に光ビームを入射させる照射部と、その貫通孔を通過した光ビームを検出する受光部と、受光部の検出結果を用いて放電ランプの角度を求める光源制御系とを備える。放電ランプの使用済みか否か又は回転角などの状態を容易に確認できる。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
KR1020180091052CN108780280