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1. (WO2017099215) SPUTTERING TARGET, LAMINATE, MULTI-LAYER BODY, AND METHOD FOR PRODUCING LAMINATE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/099215 International Application No.: PCT/JP2016/086699
Publication Date: 15.06.2017 International Filing Date: 09.12.2016
IPC:
C23C 14/34 (2006.01) ,B32B 9/00 (2006.01) ,C03C 17/245 (2006.01) ,C03C 17/36 (2006.01) ,C03C 27/06 (2006.01) ,C23C 14/08 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
B PERFORMING OPERATIONS; TRANSPORTING
32
LAYERED PRODUCTS
B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
9
Layered products essentially comprising a particular substance not covered by groups B32B11/-B32B29/137
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
17
Surface treatment of glass, e.g. of devitrified glass, not in the form of fibres or filaments, by coating
22
with other inorganic material
23
Oxides
245
by deposition from the vapour phase
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
17
Surface treatment of glass, e.g. of devitrified glass, not in the form of fibres or filaments, by coating
34
with at least two coatings having different compositions
36
at least one coating being a metal
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
27
Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
06
Joining glass to glass by processes other than fusing
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
08
Oxides
Applicants:
旭硝子株式会社 ASAHI GLASS COMPANY, LIMITED [JP/JP]; 東京都千代田区丸の内一丁目5番1号 5-1, Marunouchi 1-chome, Chiyoda-ku, Tokyo 1008405, JP
Inventors:
大越 雄斗 OHKOSHI Kazuto; JP
渡邉 俊成 WATANABE Toshinari; JP
宮川 直通 MIYAKAWA Naomichi; JP
Agent:
特許業務法人サクラ国際特許事務所 SAKURA PATENT OFFICE, P.C.; 東京都千代田区内神田一丁目18番14号 ヨシザワビル6階 6F Yoshizawa Bldg., 18-14, Uchikanda 1-chome, Chiyoda-ku, Tokyo 1010047, JP
Priority Data:
2015-24257311.12.2015JP
Title (EN) SPUTTERING TARGET, LAMINATE, MULTI-LAYER BODY, AND METHOD FOR PRODUCING LAMINATE
(FR) CIBLE DE PULVÉRISATION, STRATIFIÉ, CORPS MULTICOUCHE ET PROCÉDÉ DE FABRICATION DE STRATIFIÉ
(JA) スパッタリングターゲット、積層体、複層体、および積層体の製造方法
Abstract:
(EN) Provided is a sputtering target with which a film can be formed at a high film-forming rate by reactive sputtering of a Zn-Sn complex oxide film. Furthermore, provided are a laminate and a multi-layer body having the Zn-Sn complex oxide film formed by using such a sputtering target, as well as method for producing a laminate. The sputtering target contains 5 to 88 mass% of Zn, 5 to 88 mass% of Sn, and 7 to 90 mass% of Bi, with respect to the total metal content.
(FR) L'invention concerne une cible de pulvérisation avec laquelle un film peut être formé à une grande vitesse de formation de film par pulvérisation réactive d'un film d'oxyde complexe de Zn-Sn. En outre, l'invention concerne un stratifié et un corps multicouche ayant le film d'oxyde complexe de Zn-Sn formé en utilisant une telle cible de pulvérisation, ainsi qu'un procédé de fabrication d'un stratifié. La cible de pulvérisation contient de 5 à 88 % en masse de Zn, de 5 à 88 % en masse de Sn et de 7 à 90 % en masse de Bi, par rapport à la teneur totale en métal.
(JA) Zn-Sn複合酸化物膜を反応性スパッタリングにより高い成膜速度で成膜できるスパッタリングターゲットを提供する。また、このようなスパッタリングターゲットを用いて成膜されたZn-Sn複合酸化物膜を有する積層体および複層体、ならびに積層体の製造方法を提供する。 スパッタリングターゲットは、全金属量に対して、Znを5~88質量%、Snを5~88質量%、Biを7~90質量%含有する。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)