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1. (WO2017098958) CHARGED PARTICLE BEAM DEVICE AND CONTROL METHOD THEREFOR
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/098958 International Application No.: PCT/JP2016/085325
Publication Date: 15.06.2017 International Filing Date: 29.11.2016
Chapter 2 Demand Filed: 30.03.2017
IPC:
H01J 37/20 (2006.01) ,H01J 37/28 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
20
Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26
Electron or ion microscopes; Electron- or ion-diffraction tubes
28
with scanning beams
Applicants:
株式会社日立ハイテクノロジーズ HITACHI HIGH-TECHNOLOGIES CORPORATION [JP/JP]; 東京都港区西新橋一丁目24番14号 24-14, Nishi Shimbashi 1-chome, Minato-ku, Tokyo 1058717, JP
Inventors:
砂押 毅志 SUNAOSHI, Takeshi; JP
生頼 義久 ORAI, Yoshihisa; JP
波多野 治彦 HATANO, Haruhiko; JP
水尾 考志 MIZUO, Takashi; JP
Agent:
特許業務法人筒井国際特許事務所 TSUTSUI & ASSOCIATES; 東京都新宿区新宿2丁目3番10号 新宿御苑ビル3階 3F, Shinjuku Gyoen Bldg., 3-10, Shinjuku 2-chome, Shinjuku-ku, Tokyo 1600022, JP
Priority Data:
PCT/JP2015/08436008.12.2015JP
Title (EN) CHARGED PARTICLE BEAM DEVICE AND CONTROL METHOD THEREFOR
(FR) DISPOSITIF À FAISCEAU DE PARTICULES CHARGÉES ET PROCÉDÉ DE COMMANDE ASSOCIÉ
(JA) 荷電粒子線装置およびその制御方法
Abstract:
(EN) Provided is a charged particle beam device that is capable of maintaining a temperature, in a cooling unit which is inside a vacuum application device and which uses a refrigerant. This charged particle beam device is provided with the following: a cooling tank (1) that accommodates a refrigerant (2) for cooling a cooling unit (5); a cooling pipe (6) that supplies the refrigerant (2) from the cooling tank (1) to the cooling unit (5); and a unit that, in a case where the refrigerant (2) is biased so as to be solid, guides such refrigerant (2) so that the refrigerant can be liquefied.
(FR) L'invention concerne un dispositif à faisceau de particules chargées pouvant maintenir une température dans une unité de refroidissement qui se trouve à l'intérieur d'un dispositif d'application de vide et qui utilise un fluide frigorigène. Ce dispositif à faisceau de particules chargées comprend : un réservoir de refroidissement (1) contenant un fluide frigorigène (2) destiné à refroidir une unité de refroidissement (5) ; un tuyau de refroidissement (6) destiné à acheminer le fluide frigorigène (2) du réservoir de refroidissement (1) à l'unité de refroidissement (5) ; et une unité qui, dans le cas où le fluide frigorigène (2) est polarisé de sorte à être solide, guide ledit fluide (2) afin qu'il puisse être liquéfié.
(JA) 冷媒を用いた真空応用装置内の冷却部において、温度維持を可能とする荷電粒子線装置である。この荷電粒子線装置は、冷却部(5)を冷却する冷媒(2)を収容する冷却タンク(1)と、冷却タンク(1)から冷却部(5)まで冷媒(2)を供給する冷却パイプ(6)と、冷媒(2)が固体に偏っている場合、該冷媒(2)が液化するように導くユニットと、を備える。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
DE112016004864JPWO2017098958US20180350554CN108885962