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1. (WO2017098813) TRANSPORT SYSTEM AND TRANSPORT METHOD
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/098813 International Application No.: PCT/JP2016/080976
Publication Date: 15.06.2017 International Filing Date: 19.10.2016
IPC:
H01L 21/677 (2006.01) ,G05D 1/02 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
G PHYSICS
05
CONTROLLING; REGULATING
D
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
1
Control of position, course, altitude, or attitude of land, water, air, or space vehicles, e.g. automatic pilot
02
Control of position or course in two dimensions
Applicants:
村田機械株式会社 MURATA MACHINERY, LTD. [JP/JP]; 京都府京都市南区吉祥院南落合町3番地 3, Minami Ochiai-cho, Kisshoin, Minami-ku, Kyoto-shi, Kyoto 6018326, JP
Inventors:
原崎 一見 HARASAKI Kazumi; JP
Agent:
長谷川 芳樹 HASEGAWA Yoshiki; JP
黒木 義樹 KUROKI Yoshiki; JP
柴山 健一 SHIBAYAMA Kenichi; JP
Priority Data:
2015-24004409.12.2015JP
Title (EN) TRANSPORT SYSTEM AND TRANSPORT METHOD
(FR) SYSTÈME DE TRANSPORT ET PROCÉDÉ DE TRANSPORT
(JA) 搬送システム及び搬送方法
Abstract:
(EN) A track 10 of a transport system 1 is provided with a stand-by section 30 for having a transport vehicle 20 stand by in correspondence to a specific processing device 100A. A controller 50, upon learning of the presence of a transport request for transporting a front opening unified pod (FOUP) 90 to a load port 101 of the specific processing device 100A, allocates to the transport vehicle 20 a first transport command for transporting the FOUP 90 to the stand-by section 30. The transport vehicle 20, upon arriving at the stand-by section 30, stands by while holding the FOUP 90. Thereafter, the controller 50, upon learning that the situation is such that the FOUP 90 can be transported to the load port 101 of the specific processing device 100A, allocates to the transport vehicle 20 a second transport command for transporting the FOUP 90 to the load port 101 of the specific processing device 100A.
(FR) Selon la présente invention, une piste (10) d'un système de transport (1) est pourvue d'une section d'attente (30) permettant à un véhicule de transport (20) d'être en attente en correspondance avec un dispositif de traitement spécifique (100A). Un dispositif de commande (50), lorsque ce dernier découvre la présence d'une demande de transport permettant de transporter une nacelle unifiée à ouverture frontale (FOUP) (90) à un port de charge (101) du dispositif de traitement spécifique (100A), affecte au véhicule de transport (20) une première instruction de transport pour transporter le FOUP (90) à la section d'attente (30). Le véhicule de transport (20), lors de l'arrivée au niveau de la section d'attente (30), reste en attente tout en maintenant le FOUP (90). Ensuite, le dispositif de commande (50), lorsque ce dernier découvre que la situation est de telle sorte que le FOUP (90) peut être transporté vers l'orifice de charge (101) du dispositif de traitement spécifique (100A), affecte au véhicule de transport (20) une seconde instruction de transport pour transporter le FOUP (90) à l'orifice de charge (101) du dispositif de traitement spécifique (100A).
(JA) 搬送システム1の軌道10には、特定の処理装置100Aに対応して、搬送車20を待機させる待機区間30が設けられている。コントローラ50は、特定の処理装置100Aのロードポート101にFOUP90を搬送する搬送要求が存在することを把握した場合には、搬送車20に対して、待機区間30にFOUP90を搬送する第1搬送指令を割り付ける。当該搬送車20は、待機区間30に到着した場合には、FOUP90を保持した状態で待機する。その後、コントローラ50は、特定の処理装置100Aのロードポート101にFOUP90を搬送可能な状況にあることを把握した場合には、当該搬送車20に対して、特定の処理装置100Aのロードポート101にFOUP90を搬送する第2搬送指令を割り付ける。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
CN108352349US20180348778