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1. (WO2017098804) CONVEYANCE SYSTEM
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/098804 International Application No.: PCT/JP2016/080412
Publication Date: 15.06.2017 International Filing Date: 13.10.2016
IPC:
B65G 1/00 (2006.01) ,H01L 21/677 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
1
Storing articles, individually or in orderly arrangement, in warehouses or magazines
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
Applicants:
村田機械株式会社 MURATA MACHINERY, LTD. [JP/JP]; 京都府京都市南区吉祥院南落合町3番地 3, Minami Ochiai-cho, Kisshoin, Minami-ku, Kyoto-shi, Kyoto 6018326, JP
Inventors:
本田 修 HONDA Osamu; JP
山田 啓二 YAMADA Keiji; JP
小野 大輔 ONO Daisuke; JP
野沢 高志 NOZAWA Takashi; JP
Agent:
長谷川 芳樹 HASEGAWA Yoshiki; JP
黒木 義樹 KUROKI Yoshiki; JP
柴山 健一 SHIBAYAMA Kenichi; JP
Priority Data:
2015-23961508.12.2015JP
Title (EN) CONVEYANCE SYSTEM
(FR) SYSTÈME DE TRANSPORT
(JA) 搬送システム
Abstract:
(EN) A conveyance system comprising a track, a plurality of overhead conveyance vehicles, a storage device, and a conveyance controller that controls the actions of the overhead conveyance vehicles and a local vehicle, in accordance with an operation mode. The storage device has a storage unit and a local vehicle that is capable of transferring FOUP between a device port and the storage unit. The conveyance controller is capable of switching operation modes between: a first mode in which transfer actions from the device port to the storage unit by the local vehicle are prohibited; a second mode in which transfer actions by the overhead conveyance vehicles to the storage unit and transfer actions by the local vehicle from the storage unit to the device port are prohibited; and a third mode in which transfer actions by the local vehicle are not limited.
(FR) Le système de transport de l’invention est équipé d’une orbite, d’une pluralité de véhicules de transport au plafond, d’un dispositif de maintien, et d’un organe de commande de transport qui commande le fonctionnement des véhicules de transport au plafond et d’un véhicule local selon un mode opérationnel. Le dispositif de maintien possède une partie maintien, et le véhicule local permettant de transférer un contenant unifié à ouverture frontale entre une porte pour dispositif et la partie maintien. L’organe de commande de transport permet la commutation du mode opérationnel entre un premier mode interdisant un fonctionnement de transfert de la porte pour dispositif à la partie maintien du véhicule local, un second mode interdisant un fonctionnement de transfert vers la partie maintien des véhicules de transport au plafond, et un fonctionnement de la partie maintien vers la porte pour dispositif du véhicule locale, et un troisième mode limitant le fonctionnement de transfert du véhicule local.
(JA) 搬送システムは、軌道と、複数の天井搬送車と、保管装置と、運用モードに応じて天井搬送車及びローカル台車の動作を制御する搬送コントローラと、を備える。保管装置は、保管部と、装置ポート及び保管部の間でFOUPを移載可能なローカル台車と、を有する。搬送コントローラは、ローカル台車による装置ポートから保管部への移載動作を禁止する第1のモード、天井搬送車による保管部への移載動作及びローカル台車による保管部から装置ポートへの移載動作を禁止する第2のモード、並びにローカル台車による移載動作を制限しない第3のモードの間で、運用モードを切替可能となっている。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
SG11201804595XIL259859CN108349650KR1020180088695EP3388368US20180350646