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1. (WO2017098453) MEMS SENSOR WITH VOLTAGE SENSING OF MOVABLE MASS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/098453 International Application No.: PCT/IB2016/057471
Publication Date: 15.06.2017 International Filing Date: 09.12.2016
IPC:
G01C 19/5726 (2012.01)
G PHYSICS
01
MEASURING; TESTING
C
MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
5719
using planar vibrating masses driven in a translation vibration along an axis
5726
Signal processing
Applicants:
PANASONIC CORPORATION [JP/JP]; 1006, Oaza Kadoma Kadoma-shi Osaka 571-8501, JP
Inventors:
GIAMBASTIANI, Adolfo; US
RUOHIO, Jaakko; US
Agent:
SHVARTS, Alexander; Haley Guiliano LLP 75 Broad Street, Suite 1000 New York, NY 10004, US
Priority Data:
15/258,93907.09.2016US
62/265,92510.12.2015US
Title (EN) MEMS SENSOR WITH VOLTAGE SENSING OF MOVABLE MASS
(FR) CAPTEUR À SYSTÈME MICRO-ÉLECTRO-MÉCANIQUE (MEMS) À DÉTECTION DE TENSION DE MASSE MOBILE
Abstract:
(EN) A suspended spring-mass system (202-204) is suspended from a plurality of the anchoring points (201, 205). A source voltage (206) is provided from one of anchoring points (201) to the suspended spring-mass system (202-204). The other anchoring points (205) have measurement nodes (207) which measure the voltage at those anchoring points (205). If a voltage other than the source voltage (206) is received at one of the measurement nodes (207), an error is identified.
(FR) Selon l'invention, un système suspendu ressort-masse (202-204) est suspendu à partir d'une pluralité des points d'ancrage (201, 205). Une tension source (206) est fourni de l'un des points d'ancrage (201) au système suspendu ressort-masse (202-204). Les autres points d'ancrage (205) ont des nœuds de mesure (207) qui mesurent la tension au niveau de ces points d'ancrage (205). Si une tension autre que la tension source (206) est reçue sur l'un des nœuds de mesure (207), une erreur est détectée.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP3387376