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1. (WO2017098445) IDENTIFICATION OF A SEAL FAILURE IN MEMS DEVICES
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/098445 International Application No.: PCT/IB2016/057461
Publication Date: 15.06.2017 International Filing Date: 09.12.2016
IPC:
G01C 19/5769 (2012.01) ,G01P 15/08 (2006.01) ,G01C 19/5726 (2012.01) ,B81B 7/00 (2006.01)
G PHYSICS
01
MEASURING; TESTING
C
MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
5719
using planar vibrating masses driven in a translation vibration along an axis
5769
Manufacturing; Mounting; Housings
G PHYSICS
01
MEASURING; TESTING
P
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02
by making use of inertia forces
08
with conversion into electric or magnetic values
G PHYSICS
01
MEASURING; TESTING
C
MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
5719
using planar vibrating masses driven in a translation vibration along an axis
5726
Signal processing
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
7
Micro-structural systems
Applicants:
PANASONIC CORPORATION [JP/JP]; 1006, Oaza Kadoma Kadoma-shi Osaka 571-8501, JP
Inventors:
CORONATO, Luca; US
GAFFORELLI, Giacomo; US
GIAMBASTIANI, Adolfo; US
Agent:
SHVARTS, Alexander; Haley Guiliano LLP 75 Broad Street, Suite 1000 New York, NY 10004, US
Priority Data:
15/258,72007.09.2016US
62/265,91310.12.2015US
Title (EN) IDENTIFICATION OF A SEAL FAILURE IN MEMS DEVICES
(FR) IDENTIFICATION D'UNE DÉFAILLANCE D'ÉTANCHÉITÉ DANS DES DISPOSITIFS MEMS
Abstract:
(EN) A microelectromechanical sensor (MEMS) package includes a gyroscope and an accelerometer. The gyroscope is located within a low-pressure cavity that is sealed from an external pressure. The accelerometer is located within a cavity, and the seal for the accelerometer cavity is entirely within the gyroscope cavity. Under normal operating conditions, the accelerometer seal holds the accelerometer cavity at a higher pressure than the pressure of the enclosing gyroscope cavity. In the event that one of the gyroscope seal or the accelerometer seal is broken, the gyroscope senses the change in pressure and a failure is identified.
(FR) L'invention concerne un boîtier de capteur micro-électromécanique (MEMS) comprenant un gyroscope et un accéléromètre. Le gyroscope est situé dans une cavité basse pression qui est scellée hermétiquement par rapport à une pression externe. L'accéléromètre est situé à l'intérieur d'une cavité, et le joint pour la cavité de l'accéléromètre est entièrement à l'intérieur de la cavité du gyroscope. Dans des conditions de fonctionnement normal, le joint de l'accéléromètre maintient la cavité de l'accéléromètre à une pression supérieure à la pression de la cavité renfermant le gyroscope. Au cas où le joint du gyroscope ou celui de l'accéléromètre se briserait, le gyroscope détecte le changement de pression et une défaillance est identifiée.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP3387380