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1. (WO2017097336) HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE DURING SUBSTRATE PROCESSING IN A VACUUM PROCESSING CHAMBER, CARRIER FOR SUPPORTING A SUBSTRATE IN A VACUUM PROCESSING CHAMBER, AND METHOD FOR HOLDING A SUBSTRATE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/097336 International Application No.: PCT/EP2015/078887
Publication Date: 15.06.2017 International Filing Date: 07.12.2015
IPC:
C23C 14/50 (2006.01) ,B65G 15/42 (2006.01) ,B65G 15/58 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
50
Substrate holders
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
15
Conveyers having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
30
Belts or like endless load-carriers
32
made of rubber or plastics
42
having ribs, ridges, or other surface projections
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
15
Conveyers having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
30
Belts or like endless load-carriers
58
with means for holding or retaining the loads in fixed position, e.g. magnetic
Applicants:
APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054, US
LAU, Simon [DE/DE]; DE (US)
Inventors:
LAU, Simon; DE
Agent:
ZIMMERMANN & PARTNER PATENTANWÄLTE MBB; Josephspitalstr. 15 80331 München, DE
Priority Data:
Title (EN) HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE DURING SUBSTRATE PROCESSING IN A VACUUM PROCESSING CHAMBER, CARRIER FOR SUPPORTING A SUBSTRATE IN A VACUUM PROCESSING CHAMBER, AND METHOD FOR HOLDING A SUBSTRATE
(FR) AGENCEMENT DE RETENUE DESTINÉ À TENIR UN SUBSTRAT PENDANT LE TRAITEMENT DU SUBSTRAT DANS UNE CHAMBRE DE TRAITEMENT SOUS VIDE, SUPPORT POUR SUPPORTER UN SUBSTRAT DANS UNE CHAMBRE DE TRAITEMENT SOUS VIDE ET PROCÉDÉ POUR TENIR UN SUBSTRAT
Abstract:
(EN) The present disclosure provides a holding arrangement (100) for holding a substrate (10) during substrate processing in a vacuum processing chamber (912). The holding arrangement (100) includes a flexible device having one or more sections, wherein the one or more sections are provided in a first operation condition to have a first portion, a second portion and a curved portion, wherein the curved portion is provided between the first portion and the second portion, wherein the first portion has a surface configured to face the substrate, and wherein the first portion and the second portion are moveable with respect to each other, and an adhesive (20) is provided on the surface of the first portion.
(FR) La présente invention concerne un agencement de retenue (100) pour tenir un substrat (10) pendant le traitement du substrat dans une chambre de traitement (912) sous vide. L'agencement de retenue (100) comprend un dispositif souple présentant une ou plusieurs sections, ladite une ou lesdites plusieurs sections étant utilisées dans un premier état de fonctionnement de manière à présenter une première partie, une deuxième partie et une partie incurvée, la partie incurvée étant située entre la première partie et la deuxième partie, la première partie présentant une surface conçue pour faire face au substrat et la première partie et la deuxième partie étant mobiles l'une par rapport à l'autre et un adhésif (20) étant situé sur la surface de la première partie.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
CN108350570KR1020180091077US20180282860