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1. (WO2017094889) MAGNETISM DETECTING DEVICE AND METHOD FOR MANUFACTURING SAME
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/094889 International Application No.: PCT/JP2016/085921
Publication Date: 08.06.2017 International Filing Date: 02.12.2016
IPC:
G01R 33/09 (2006.01) ,G01R 33/02 (2006.01) ,H01L 43/08 (2006.01)
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
33
Arrangements or instruments for measuring magnetic variables
02
Measuring direction or magnitude of magnetic fields or magnetic flux
06
using galvano-magnetic devices
09
Magneto-resistive devices
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
33
Arrangements or instruments for measuring magnetic variables
02
Measuring direction or magnitude of magnetic fields or magnetic flux
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
43
Devices using galvano-magnetic or similar magnetic effects; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof
08
Magnetic-field-controlled resistors
Applicants:
アルプス電気株式会社 ALPS ELECTRIC CO., LTD. [JP/JP]; 東京都大田区雪谷大塚町1番7号 1-7, Yukigaya-otsukamachi, Ota-ku, Tokyo 1458501, JP
Inventors:
梅津 英治 UMETSU, Eiji; JP
Agent:
野▲崎▼ 照夫 NOZAKI, Teruo; JP
Priority Data:
2015-23685503.12.2015JP
Title (EN) MAGNETISM DETECTING DEVICE AND METHOD FOR MANUFACTURING SAME
(FR) DISPOSITIF DE DÉTECTION DE MAGNÉTISME ET SON PROCÉDÉ DE FABRICATION
(JA) 磁気検知装置およびその製造方法
Abstract:
(EN) [Problem] To provide a magnetism detecting device for detecting the magnetism in each of the X-Y-Z directions by forming magnetoresistive effect elements on inclined side surfaces of recessed sections formed in a substrate and a method for manufacturing the same. [Solution] A Z detecting section (10) is provided with magnetoresistive effect elements (40) (R1, R2, R3, R4) on inclined side surfaces (13, 14) of Z detecting recessed sections (11A, 11B), an X detecting section (20) is provided with magnetoresistive effect elements (40) (R5, R6, R7, R8) on inclined side surfaces (23, 24) of X detecting recessed sections (21A, 21B), and a Y detecting section (30) is provided with magnetoresistive effect elements (40) (R9, R10, R11, R12) on inclined side surfaces (33, 34) of Y detecting recessed sections (31A, 31B). The fixed magnetization (P) of a fixed magnetic layer of each of the magnetoresistive effect elements (40) is determined in the directions indicated by the solid line arrows.
(FR) L'invention vise à fournir un dispositif de détection de magnétisme pour détecter le magnétisme dans chacune des directions X-Y-Z en formant des éléments à effet de magnétorésistance sur des surfaces latérales inclinées de sections évidées formées dans un substrat, et son procédé de fabrication. À cet effet, une section de détection Z (10) comprend des éléments à effet de magnétorésistance (40) (R1, R2, R3, R4) sur des surfaces latérales inclinées (13, 14) de sections évidées de détection Z (11A, 11B), une section de détection X (20) comprend des éléments à effet de magnétorésistance (40) (R5, R6, R7, R8) sur des surfaces latérales inclinées (23, 24) de sections évidées de détection X (21A, 21B), et une section de détection Y (30) comprend des éléments à effet de magnétorésistance (40) (R9, R10, R11, R12) sur des surfaces latérales inclinées (33, 34) de sections évidées de détection Y (31A, 31B). L'aimantation fixe (P) d'une couche magnétique fixe de chacun des éléments à effet de magnétorésistance (40) est déterminée dans les directions indiquées par les flèches en trait plein.
(JA) 【課題】 基板に形成された凹部の傾斜側面に磁気抵抗効果素子を形成することで、X-Y-Z方向のそれぞれの磁気を検知する磁気検知装置およびその製造方法を提供する。【解決手段】 Z検知部(10)では、Z検知凹部(11A,11B)の傾斜側面(13,14)に磁気抵抗効果素子(40)(R1,R2,R3,R4)が設けられ、X検知部(20)では、X検知凹部(21A,21B)の傾斜側面(23,24)に磁気抵抗効果素子(40)(R5,R6,R7,R8)が設けられ、Y検知部(30)では、Y検知凹部(31A,31B)の傾斜側面(33,34)に磁気抵抗効果素子(40)(R9,R10,R11,R12)が設けられている。それぞれの磁気抵抗効果素子(40)の固定磁性層の固定磁化(P)は実線の矢印で示す向きに決められている。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
CN108291948EP3385740