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1. (WO2017094751) INSPECTION DEVICE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/094751 International Application No.: PCT/JP2016/085484
Publication Date: 08.06.2017 International Filing Date: 30.11.2016
IPC:
G01N 21/956 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
95
characterised by the material or shape of the object to be examined
956
Inspecting patterns on the surface of objects
Applicants:
株式会社ブイ・テクノロジー V TECHNOLOGY CO., LTD. [JP/JP]; 神奈川県横浜市保土ヶ谷区神戸町134番地 134, Godo-cho, Hodogaya-ku, Yokohama-shi, Kanagawa 2400005, JP
Inventors:
米澤 良 YONEZAWA Makoto; JP
Agent:
坂田 ゆかり SAKATA Yukari; JP
Priority Data:
2015-23722604.12.2015JP
Title (EN) INSPECTION DEVICE
(FR) DISPOSITIF D'INSPECTION
(JA) 検査装置
Abstract:
(EN) An inspection device in which a photomask is supported in the vertical direction, wherein the center-of-gravity position of the device can be lowered even when an anti-vibration stage is provided below a surface plate. A substantially cube-shaped recess 10b is formed at each of the four corners of the lower surface 10a of the surface plate 10. The bottom surfaces of the recesses 10b are supported by an anti-vibration stage 51, which is higher than the recess is deep.
(FR) L'invention concerne un dispositif d'inspection dans lequel un photomasque est maintenu dans la direction verticale, la position du centre de gravité du dispositif pouvant être abaissée même lorsqu'une platine anti-vibrations est disposée sous une plaque de surface. Un évidement sensiblement en forme de cube (10b) est formé au niveau de chacun des quatre coins de la surface inférieure (10a) de la plaque de surface (10). Les surfaces inférieures des évidements (10b) sont maintenues par une platine anti-vibrations (51), qui est plus haute que l'évidement est profond.
(JA) 鉛直方向にフォトマスクを支持する検査装置において、定盤の下に除振台を設けつつも、装置の重心位置を低くすることができる。 定盤10の下面10aの四隅に、それぞれ略立方体形状の凹部10bが形成される。凹部10bの底面は、それぞれ凹部の深さより高さが高い除振台51により支持される。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
CN108351312KR1020180090992