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1. (WO2017094565) CONVEYANCE DEVICE, PROCESSING DEVICE, CONVEYANCE METHOD, AND PROCESSING METHOD
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/094565 International Application No.: PCT/JP2016/084615
Publication Date: 08.06.2017 International Filing Date: 22.11.2016
IPC:
G01N 21/84 (2006.01) ,B65G 47/46 (2006.01) ,H01L 21/677 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
47
Article or material-handling devices associated with conveyers; Methods employing such devices
34
Devices for discharging articles or materials from conveyers
46
with distribution, e.g. automatically, to desired points
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
Applicants:
株式会社SCREENホールディングス SCREEN HOLDINGS CO., LTD. [JP/JP]; 京都府京都市上京区堀川通寺之内上る4丁目天神北町1番地の1 Tenjinkita-machi 1-1, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-shi, Kyoto 6028585, JP
Inventors:
吉田 巧 YOSHIDA Takumi; JP
田中 巌 TANAKA Iwao; JP
Agent:
西田 隆美 NISHIDA Takami; JP
Priority Data:
2015-23708104.12.2015JP
2015-23708204.12.2015JP
2015-23708304.12.2015JP
Title (EN) CONVEYANCE DEVICE, PROCESSING DEVICE, CONVEYANCE METHOD, AND PROCESSING METHOD
(FR) DISPOSITIF DE TRANSPORT, DISPOSITIF DE TRAITEMENT, PROCÉDÉ DE TRANSPORT ET PROCÉDÉ DE TRAITEMENT
(JA) 搬送装置、処理装置、搬送方法、および処理方法
Abstract:
(EN) This conveyance device (1) conveys an inspection object (9) between a first position (P1), an intermediate position (Pm), and a third position (P3), which are arranged in a first direction in this order, and a second position (P2) adjacent, in a second direction intersecting the first direction, to the intermediate position (Pm). First, one stage (10) is moved to the first position (P1), the second position (P2), and the third position (P3) in this order. Next, another stage (10) is moved from the first position (P1) to the second position (P2). Thereafter, the one first moved of the stages (10) is moved from the third position (P3) to the first position (P1). Accordingly, a process of conveying the inspection object (9) through the two stages (10) can be efficiently performed without separately providing a conveyance path for return.
(FR) L'invention concerne un dispositif de transport (1) qui transporte un objet d'inspection (9) entre une première position (P1), une position intermédiaire (Pm) et une troisième position (P3), qui sont agencées dans une première direction dans cet ordre, et une deuxième position (P2) adjacente, dans une seconde direction croisant la première direction, à la position intermédiaire (Pm). D'abord, une platine (10) est déplacée vers la première position (P1), la deuxième position (P2) et la troisième position (P3) dans cet ordre. Ensuite, une autre platine (10) est déplacée de la première position (P1) à la seconde position (P2). Puis, la première des platines déplacées (10) est déplacée de la troisième position (P3) à la première position (P1). Par conséquent, un processus de transport de l'objet d'inspection (9) par les deux platines (10) peut être effectué de manière efficace sans fournir séparément un trajet de transport pour le retour.
(JA) この搬送装置(1)は、第1方向に順に配置された第1位置(P1)、中間位置(Pm)、および第3位置(P3)と、中間位置(Pm)から第1方向に対して交差する第2方向に隣接する第2位置(P2)との間で、検査対象物(9)を搬送する。まず、第1位置(P1)、第2位置(P2)、および第3位置(P3)の順に1つのステージ(10)を移動させ、続いて、他のステージ(10)を第1位置(P1)から第2位置(P2)に移動させる。その後、先に移動させた1つのステージ(10)を、第3位置(P3)から第1位置(P1)へ移動させる。これにより、帰還用の搬送経路を別に設けることなく、2つのステージ(10)よる検査対象物(9)の搬送処理を、効率よく行うことができる。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)