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1. (WO2017094547) METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELEMENT
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/094547 International Application No.: PCT/JP2016/084475
Publication Date: 08.06.2017 International Filing Date: 21.11.2016
IPC:
H05B 33/10 (2006.01) ,C23C 14/08 (2006.01) ,H01L 51/48 (2006.01) ,H01L 51/50 (2006.01) ,H05B 33/26 (2006.01)
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
B
ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
33
Electroluminescent light sources
10
Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
08
Oxides
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
42
specially adapted for sensing infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation; specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
48
Processes or apparatus specially adapted for the manufacture or treatment of such devices or of parts thereof
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50
specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
B
ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
33
Electroluminescent light sources
12
Light sources with substantially two-dimensional radiating surfaces
26
characterised by the composition or arrangement of the conductive material used as an electrode
Applicants:
国立大学法人東京工業大学 TOKYO INSTITUTE OF TECHNOLOGY [JP/JP]; 東京都目黒区大岡山2丁目12番1号 2-12-1, Ookayama, Meguro-ku, Tokyo 1528550, JP
旭硝子株式会社 ASAHI GLASS COMPANY, LIMITED [JP/JP]; 東京都千代田区丸の内一丁目5番1号 5-1, Marunouchi 1-chome, Chiyoda-ku, Tokyo 1008405, JP
Inventors:
細野 秀雄 HOSONO, Hideo; JP
雲見 日出也 KUMOMI, Hideya; JP
中村 伸宏 NAKAMURA, Nobuhiro; JP
渡邉 暁 WATANABE, Satoru; JP
渡邉 俊成 WATANABE, Toshinari; JP
宮川 直通 MIYAKAWA, Naomichi; JP
Agent:
伊東 忠重 ITOH, Tadashige; JP
伊東 忠彦 ITOH, Tadahiko; JP
Priority Data:
2015-23410330.11.2015JP
Title (EN) METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELEMENT
(FR) PROCÉDÉ DE FABRICATION D'ÉLÉMENT DE CONVERSION PHOTOÉLECTRIQUE
(JA) 光電変換素子を製造する方法
Abstract:
(EN) A method for manufacturing a photoelectric conversion element, said method comprising: a step in which a first electrode is positioned on a substrate; a step in which a first thin film is positioned above the first electrode, said first thin film being formed from a metal oxide that includes zinc (Zn) and oxygen (O) and further includes silicon (Si) and/or tin (Sn); a step in which pressure is applied to the substrate using a gas, said substrate having the first electrode and the first thin film; a step in which a photoelectric conversion layer is positioned above the first thin film, said photoelectric conversion layer being a layer than converts an applied voltage into light or a layer that converts incident light into electricity; and a step in which a second electrode is positioned above the photoelectric conversion layer.
(FR) La présente invention porte sur un procédé de fabrication d'élément de conversion photoélectrique, ledit procédé comprenant : une étape dans laquelle une première électrode est positionnée sur un substrat ; une étape dans laquelle un premier film mince est positionné au-dessus de la première électrode, ledit premier film mince étant formé à partir d'un oxyde métallique qui comprend du zinc (Zn) et de l'oxygène (O) et comprend en outre du silicium (Si) et/ou de l'étain (Sn) ; une étape dans laquelle une pression est appliquée sur le substrat par un gaz, ledit substrat ayant la première électrode et le premier film mince ; une étape dans laquelle une couche de conversion photoélectrique est positionnée au-dessus du premier film mince, ladite couche de conversion photoélectrique étant une couche qui convertit une tension appliquée en lumière ou une couche qui convertit une lumière incidente en électricité ; et une étape dans laquelle une seconde électrode est positionnée au-dessus de la couche de conversion photoélectrique.
(JA) 光電変換素子を製造する方法であって、基板に第1の電極を配置するステップと、前記第1の電極の上部に、亜鉛(Zn)および酸素(O)を含み、さらに、ケイ素(Si)およびスズ(Sn)のうちの少なくとも1つを含む金属酸化物で構成される第1の薄膜を配置するステップと、前記第1の電極および前記第1の薄膜を有する前記基板に、気体により圧力を印加するステップと、前記第1の薄膜の上部に、印加電圧を光に変換する層、または入射光を電力に変換する層である光電変換層を配置するステップと、前記光電変換層の上部に、第2の電極を配置するステップと、を有する方法。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
CN108293281KR1020180087259