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1. (WO2017094440) HARD COATING, HARD COATING-COVERED MEMBER AND MANUFACTURING METHOD THEREFOR, AND TARGET USED FOR PRODUCING HARD COATING AND MANUFACTURING METHOD THEREFOR
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/094440 International Application No.: PCT/JP2016/082794
Publication Date: 08.06.2017 International Filing Date: 04.11.2016
IPC:
C23C 14/06 (2006.01) ,B23B 27/14 (2006.01) ,C23C 14/02 (2006.01) ,C23C 14/32 (2006.01) ,C22C 29/08 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
B
TURNING; BORING
27
Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
14
Cutting tools of which the bits or tips are of special material
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
02
Pretreatment of the material to be coated
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
32
by explosion; by evaporation and subsequent ionisation of the vapours
C CHEMISTRY; METALLURGY
22
METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
C
ALLOYS
29
Alloys based on carbides, oxides, borides, nitrides or silicides, e.g. cermets, or other metal compounds, e. g. oxynitrides, sulfides
02
based on carbides or carbonitrides
06
based on carbides, but not containing other metal compounds
08
based on tungsten carbide
Applicants:
三菱日立ツール株式会社 MITSUBISHI HITACHI TOOL ENGINEERING, LTD. [JP/JP]; 東京都墨田区両国4丁目31番11号 31-11, Ryogoku 4-chome, Sumida-ku, Tokyo 1300026, JP
Inventors:
府玻 亮太郎 FUWA Ryoutarou; JP
久保田 和幸 KUBOTA Kazuyuki; JP
福永 有三 FUKUNAGA Yuuzoh; JP
Agent:
高石 橘馬 TAKAISHI Kitsuma; JP
Priority Data:
2015-23567202.12.2015JP
Title (EN) HARD COATING, HARD COATING-COVERED MEMBER AND MANUFACTURING METHOD THEREFOR, AND TARGET USED FOR PRODUCING HARD COATING AND MANUFACTURING METHOD THEREFOR
(FR) REVÊTEMENT DUR, ÉLÉMENT REVÊTU D'UN REVÊTEMENT DUR ET PROCÉDÉ DE FABRICATION CORRESPONDANT, ET CIBLE UTILISÉE POUR PRODUIRE UN REVÊTEMENT DUR ET PROCÉDÉ DE FABRICATION CORRESPONDANT
(JA) 硬質皮膜、硬質皮膜被覆部材及びその製造方法、及び硬質皮膜の製造に用いるターゲット及びその製造方法
Abstract:
(EN) A hard coating having a composition represented by (AlxTiyMz)aN(1-a-b)Ob (M is the element Cr and/or Nb, and x, y, z, a and b are each an atom ratio and are numbers that satisfy 0.6≤x≤0.8, 0.05≤y≤0.38, 0.02≤z≤0.2, x+y+z=1, 0.2≤a≤0.8, and 0.02≤b≤0.10), the hard coating having M-O bonds without having Al-O bonds exceeding the unavoidable impurity level for bond states identified by X-ray photoelectron spectroscopy, and having a single structure with a rock salt-type X-ray diffraction pattern.
(FR) L'invention concerne un revêtement dur présentant une composition représentée par (AlxTiyMz)aN(1-a-b)Ob (M est l'élément Cr et/ou Nb et x, y, z, a et b représentent chacun un rapport atomique et sont des nombres qui satisfont aux relations 0,6 ≤ x ≤ 0,8, 0,05 ≤ y ≤ 0,38, 0,02 ≤ z ≤ 0,2, x + y + z = 1, 0,2 ≤ a ≤ 0,8 et 0,02 ≤ b ≤ 0,10), le revêtement dur présentant des liaisons M-O sans que les liaisons Al-O ne dépassent le niveau d'impuretés inévitables pour des états de liaison identifiés par spectroscopie photoélectronique à rayons X et présentant une structure unique présentant un diagramme de diffraction de rayons X de type sel gemme.
(JA) (AlxTiyMz)aN(1-a-b)Ob(ただし、MはCr及びNbの少なくとも一種の元素であり、x、y、z、a及びbはそれぞれ原子比で、0.6≦x≦0.8、0.05≦y≦0.38、0.02≦z≦0.2、x+y+z=1、0.2≦a≦0.8、及び0.02≦b≦0.10を満たす数字である。)で表される組成を有する硬質皮膜であって、X線光電子分光分析法で特定された結合状態として不可避的不純物レベルを超えたAl-O結合を有さずにM-O結合を有し、かつX線回折パターンが岩塩型の単一構造を有する硬質皮膜。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
JPWO2017094440JP2018080394CN108368600EP3388546US20180355471