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1. (WO2017094225) IMPRINTING APPARATUS, MEASUREMENT METHOD, IMPRINTING METHOD, AND ARTICLE MANUFACTURING METHOD
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/094225 International Application No.: PCT/JP2016/004857
Publication Date: 08.06.2017 International Filing Date: 10.11.2016
IPC:
H01L 21/027 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
027
Making masks on semiconductor bodies for further photolithographic processing, not provided for in group H01L21/18 or H01L21/34165
Applicants:
CANON KABUSHIKI KAISHA [JP/JP]; 30-2, Shimomaruko 3-chome, Ohta-ku, Tokyo 1468501, JP
Inventors:
NAMBA, Hisashi; JP
KATSUTA, Ken; JP
Agent:
ABE, Takuma; JP
KUROIWA, Sogo; JP
Priority Data:
2015-23431930.11.2015JP
2015-23432030.11.2015JP
Title (EN) IMPRINTING APPARATUS, MEASUREMENT METHOD, IMPRINTING METHOD, AND ARTICLE MANUFACTURING METHOD
(FR) APPAREIL D'IMPRESSION, PROCÉDÉ DE MESURE, PROCÉDÉ D'IMPRESSION ET PROCÉDÉ DE FABRICATION D'ARTICLES
Abstract:
(EN) An embodiment of the present invention relates to an imprinting apparatus (100) that forms a pattern made of an imprint material (102) on a substrate (101) by bringing a mold (103) and the imprint material (102) into contact with each other and curing the imprint material (102). The imprinting apparatus (100) includes a moving unit (111) that moves the substrate (101), an ejecting unit (115) that ejects the imprint material (102), an acquiring unit (121) that acquires a landing position of the imprint material (102) ejected while the substrate (101) is moved in a predetermined direction by the moving unit (111), and a determining unit (122) that calculates a distance in a predetermined direction between a reference position and the landing position and determines a speed of ejection on the basis of the distance and information on a speed at which the substrate (101) is moved.
(FR) Un mode de réalisation de la présente invention concerne un dispositif d'impression (100) qui forme un motif fait d'une matière d'impression (102) sur un substrat (101) en amenant un moule (103) et la matière d'impression (102) en contact l'un avec l'autre et en durcissant la matière d'impression (102). L'appareil d'impression (100) comporte une unité mobile (111) qui déplace le substrat (101), une unité d'éjection (115) qui éjecte la matière d'impression (102), une unité d'acquisition (121) qui acquiert une position de chute de la matière d'impression (102) éjectée tandis que le substrat (101) est déplacé dans une direction prédéterminée par l'unité mobile (111), et une unité de détermination (122) qui calcule une distance dans une direction prédéterminée entre une position de référence et la position de réception et détermine une vitesse d'éjection sur la base de la distance et des informations sur une vitesse à laquelle le substrat est déplacé (101).
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
KR1020180087382