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1. (WO2017093311) NANOSTRUCTURED NICKEL OXIDE ENVIRONMENTAL SENSOR DEVICE AND A PACKAGE FOR ENCAPSULATING THE DEVICE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/093311 International Application No.: PCT/EP2016/079267
Publication Date: 08.06.2017 International Filing Date: 30.11.2016
IPC:
G01N 27/12 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27
Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
02
by investigating impedance
04
by investigating resistance
12
of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid
Applicants:
ROBERT BOSCH GMBH [DE/DE]; Postfach 30 02 20 70442 Stuttgart, DE
Inventors:
SAMARAO, Ashwin; US
Priority Data:
62/261,18830.11.2015US
62/261,19330.11.2015US
62/261,59901.12.2015US
62/262,52903.12.2015US
62/262,57203.12.2015US
Title (EN) NANOSTRUCTURED NICKEL OXIDE ENVIRONMENTAL SENSOR DEVICE AND A PACKAGE FOR ENCAPSULATING THE DEVICE
(FR) DISPOSITIF CAPTEUR ENVIRONNEMENTAL À OXYDE DE NICKEL NANOSTRUCTURÉ ET ENVELOPPE POUR ENCAPSULER LE DISPOSITIF
Abstract:
(EN) A nanostructured environmental sensor includes a silicon based substrate, a structural base located above the substrate, and a sensor portion suspended above the structural base. A top surface of the sensor portion is formed from nickel oxide using atomic layer deposition. The nanostructured thin film nickel oxide environmental sensor is provided in a housing to form an environmental sensor package for sending attributes of the environment to which the environmental sensor package is exposed.
(FR) L'invention concerne un capteur environnemental nanostructuré qui comprend un substrat à base de silicium, une base structurale située au-dessus du substrat, et une partie de capteur suspendue au-dessus de la base structurale. Une surface supérieure de la partie de capteur est formée d'oxyde de nickel par un dépôt de couche atomique. Le capteur environnemental à oxyde de nickel en couche mince nanostructurée est disposé dans un boîtier pour former une enveloppe de capteur environnemental pour envoyer des attributs de l'environnement auquel l'enveloppe de capteur environnemental est exposée.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP3384280US20180356357