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1. (WO2017092029) APPARATUS FOR HOLDING SUBSTRATE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/092029 International Application No.: PCT/CN2015/096402
Publication Date: 08.06.2017 International Filing Date: 04.12.2015
IPC:
C25D 17/06 (2006.01)
C CHEMISTRY; METALLURGY
25
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
D
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; JOINING WORKPIECES BY ELECTROLYSIS; APPARATUS THEREFOR
17
Constructional parts, or assemblies thereof, of cells for electrolytic coating
06
Suspending or supporting devices for articles to be coated
Applicants:
ACM RESEARCH (SHANGHAI) INC. [CN/CN]; Bld. 4, No. 1690 Cailun Road, Zhangjiang High-tech Park Shanghai 201203, CN
Inventors:
WANG, Hui; CN
JIA, Zhaowei; CN
YANG, Hongchao; CN
WU, Jun; CN
WANG, Jian; CN
Agent:
SHANGHAI PATENT & TRADEMARK LAW OFFICE, LLC; 435 Guiping Road Shanghai 200233, CN
Priority Data:
Title (EN) APPARATUS FOR HOLDING SUBSTRATE
(FR) APPAREIL POUR LE MAINTIEN D'UN SUBSTRAT
Abstract:
(EN) An apparatus for holding a substrate (113) has a chuck cup (101), a seal shell (111), a chuck plate (102) and a vertical driving device (103). The seal shell (111) has a bottom wall (1111), an outer wall (1112) and an inner wall (1114). The inner wall (1114) forms a lip seal portion (1115). The bottom wall (1111) and the outer wall (1112) of the seal shell (111) respectively wrap the bottom surface and the outer surface of the base portion (1011) of the chuck cup (101). The lip seal portion (1115) wraps the supporting portion (1014) of the chuck cup (101) for sealing the edge of the front side of the substrate (113). The apparatus protects the edge of the front side of the substrate, the back side of the substrate and the chuck cup from contacting with the electrolyte solution.
(FR) L'invention concerne un appareil pour le maintien d'un substrat (113), comprenant un flasque de mandrin (101), une coque d'étanchéité (111), une plaque de mandrin (102) et un dispositif d'entraînement vertical (103). La coque d'étanchéité (111) comprend une paroi inférieure (1111), une paroi externe (1112) et une paroi interne (1114). La paroi interne (1114) forme une partie joint à lèvre (1115). La paroi inférieure (1111) et la paroi externe (1112) de la coque d'étanchéité (111) enveloppent respectivement la surface inférieure et la surface externe de la partie de base (1011) de la flasque de mandrin (101). La partie joint à lèvre (1115) enveloppe la partie de support (1014) de la flasque de mandrin (101) pour enfermer hermétiquement le bord du côté avant du substrat (113). L'appareil protège le bord du côté avant du substrat, le côté arrière du substrat et la flasque de mandrin d'un contact avec la solution électrolytique.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
SG11201804654WCN108291325KR1020180087379US20180320285