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1. (WO2017090445) PIEZOELECTRIC ELEMENT, METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, INKJET HEAD AND INKJET PRINTER
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/090445 International Application No.: PCT/JP2016/083377
Publication Date: 01.06.2017 International Filing Date: 10.11.2016
IPC:
H01L 41/09 (2006.01) ,B41J 2/14 (2006.01) ,B41J 2/16 (2006.01) ,H01L 41/047 (2006.01) ,H01L 41/253 (2013.01) ,H01L 41/29 (2013.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08
Piezo-electric or electrostrictive elements
09
with electrical input and mechanical output
B PERFORMING OPERATIONS; TRANSPORTING
41
PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
J
TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
2
Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
005
characterised by bringing liquid or particles selectively into contact with a printing material
01
Ink jet
135
Nozzles
14
Structure thereof
B PERFORMING OPERATIONS; TRANSPORTING
41
PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
J
TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
2
Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
005
characterised by bringing liquid or particles selectively into contact with a printing material
01
Ink jet
135
Nozzles
16
Production of nozzles
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02
Details
04
of piezo-electric or electrostrictive elements
047
Electrodes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
22
Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
253
Treating devices or parts thereof to modify a piezo-electric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
22
Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
29
Forming electrodes, leads or terminal arrangements
Applicants:
コニカミノルタ株式会社 KONICA MINOLTA , INC. [JP/JP]; 東京都千代田区丸の内2丁目7番2号 2-7-2, Marunouchi, Chiyoda-Ku, Tokyo 1007015, JP
Inventors:
江口 秀幸 EGUCHI Hideyuki; JP
Agent:
特許業務法人 佐野特許事務所 SANO PATENT OFFICE; 大阪府大阪市中央区天満橋京町2-6天満橋八千代ビル別館5F 5F, Tenmabashi-Yachiyo Bldg. Bekkan, 2-6, Tenmabashi-Kyomachi, Chuo-Ku, Osaka-Shi, Osaka 5400032, JP
Priority Data:
2015-22888824.11.2015JP
Title (EN) PIEZOELECTRIC ELEMENT, METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, INKJET HEAD AND INKJET PRINTER
(FR) ÉLÉMENT PIÉZOÉLECTRIQUE, PROCÉDÉ DE FABRICATION D'UN ÉLÉMENT PIÉZOÉLECTRIQUE, ACTIONNEUR PIÉZOÉLECTRIQUE, TÊTE À JET D'ENCRE ET IMPRIMANTE À JET D'ENCRE
(JA) 圧電素子、圧電素子の製造方法、圧電アクチュエータ、インクジェットヘッドおよびインクジェットプリンタ
Abstract:
(EN) This piezoelectric element (27) comprises: a piezoelectric thin film (25); and a lower electrode (24) and an upper electrode (26), between which the piezoelectric thin film (25) is sandwiched. The piezoelectric thin film (25) has at least one exposed surface that is exposed to the outside, and comprises a plurality of regions having different oxygen concentrations in a direction that is perpendicular to the at least one exposed surface (for example, a surface (25a)). Among the plurality of regions having different oxygen concentrations in a direction that is perpendicular to the exposed surface, a region that includes the exposed surface has a high concentration region (25H) which has a high oxygen concentration in comparison to the regions that do not include the exposed surface.
(FR) L'invention concerne un élément piézoélectrique (27) comprenant : un film mince piézoélectrique (25) ; et une électrode inférieure (24) et une électrode supérieure (26) entre lesquelles le film mince piézoélectrique (25) est pris en sandwich. Le film mince piézoélectrique (25) présente au moins une surface exposée qui est exposée à l'extérieur, et comprend une pluralité de régions ayant des concentrations d'oxygène différentes dans une direction qui est perpendiculaire à l'au moins une surface exposée (par exemple une surface (25a)). Parmi la pluralité de régions ayant des concentrations d'oxygène différentes dans une direction qui est perpendiculaire à la surface exposée, une région qui comprend la surface exposée possède une région de concentration élevée (25H) qui présente une concentration en oxygène élevée par rapport aux régions qui ne comprennent pas la surface exposée.
(JA) 圧電素子(27)は、圧電薄膜(25)と、圧電薄膜(25)を挟持する下部電極(24)および上部電極(26)とを有している。圧電薄膜(25)は、外部に露出した露出面を少なくとも1面有しており、かつ、少なくとも1面の露出面(例えば面(25a))に垂直な方向において、酸素濃度の異なる複数の領域を有している。上記露出面に垂直な方向における酸素濃度の異なる複数の領域のうち、上記露出面を含む領域は、上記露出面を含まない領域と比較して酸素濃度が高い高濃度領域(25H)を有する。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)