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1. (WO2017070528) RELIABLE DEPOSITION OF THIN PARYLENE

Pub. No.:    WO/2017/070528    International Application No.:    PCT/US2016/058200
Publication Date: Fri Apr 28 01:59:59 CEST 2017 International Filing Date: Sat Oct 22 01:59:59 CEST 2016
IPC: C09D 165/04
B05D 1/02
B05D 3/12
Applicants: CALIFORNIA INSTITUTE OF TECHNOLOGY
Inventors: TAI, Yu-Chong
WANG, Wei
KANG, Dongyang
Title: RELIABLE DEPOSITION OF THIN PARYLENE
Abstract:
Apparatus, system, and method of depositing thin and ultra-thin parylene are described. In an example, a core deposition chamber is used. The core deposition chamber includes a base and a rigid, removable cover configured to mate and seal with the base to create the core deposition chamber and to define an inside and an outside of the core deposition chamber. The core deposition chamber also includes a conduit through a top of the cover. The conduit has a lumen connecting the inside to the outside of the core deposition chamber. The lumen has a length and a cross-section. The cross-section has a width between 50 μm and 6000 μm. The length is less than 140 times the cross-section width. The core deposition chamber can be placed in an outer deposition chamber and can achieve parylene deposition less than 1 μm thick inside the core deposition chamber.