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Machine translation
1. (WO2017069369) LINEAR EVAPORATION DEPOSITION APPARATUS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2017/069369    International Application No.:    PCT/KR2016/006114
Publication Date: 27.04.2017 International Filing Date: 09.06.2016
IPC:
H01L 51/56 (2006.01), H01L 51/00 (2006.01), C23C 14/24 (2006.01), C23C 14/26 (2006.01), C23C 14/50 (2006.01), C23C 14/12 (2006.01), H01L 21/203 (2006.01), C23C 14/56 (2006.01), H01L 21/324 (2006.01)
Applicants: FINEVA. INC. [KR/KR]; #302-309, 267, Gajeong-ro Yuseong-gu Daejeon 34113 (KR)
Inventors: KIM, Jung-Hyung; (KR).
SEO, In-Yong; (KR)
Agent: IPS PATENT FIRM; 5th Fl., 14, Banpo-daero 23-gil Seocho-gu Seoul 06656 (KR)
Priority Data:
10-2015-0147682 23.10.2015 KR
10-2015-0166510 26.11.2015 KR
10-2016-0023689 26.02.2016 KR
10-2016-0050578 26.04.2016 KR
Title (EN) LINEAR EVAPORATION DEPOSITION APPARATUS
(FR) APPAREIL DE DÉPÔT PAR ÉVAPORATION LINÉAIRE
(KO) 선형 증발 증착 장치
Abstract: front page image
(EN)The present invention provides a linear evaporation deposition apparatus. The linear evaporation deposition apparatus comprises: a vacuum container; a conductive crucible which extends in a first direction, is disposed inside the vacuum container, and receives a deposition material; a nozzle block mounted on the conductive crucible and including a plurality of penetrating nozzles; a conductive diffusion plate disposed between the nozzle block and the deposition material and diffusing vapor of the deposition material through an opening; and an induction heating coil arranged to surround the conductive crucible and the nozzle block so as to heat the conductive crucible, the conductive diffusion plate, and the nozzle block through induction heating.
(FR)La présente invention concerne un appareil de dépôt par évaporation linéaire. L'appareil de dépôt par évaporation linéaire comprend : un récipient sous vide ; un creuset conducteur qui s'étend dans une première direction, est disposé à l'intérieur du récipient sous vide, et reçoit un matériau de dépôt ; un bloc à buses monté sur le creuset conducteur et contenant une pluralité de buses pénétrantes ; une plaque de diffusion conductrice disposée entre le bloc à buses et le matériau de dépôt et diffusant de la vapeur du matériau de dépôt par une ouverture ; et une bobine de chauffage par induction agencée pour entourer le creuset conducteur et le bloc à buses de façon à chauffer le creuset conducteur, la plaque de diffusion conductrice, et le bloc à buses par chauffage par induction.
(KO)본 발명은 선형 증발 증착 장치를 제공한다. 이 선형 증발 증착 장치는 선형 증발 증착 장치는 진공 용기; 제1 방향으로 연장되고 상기 진공 용기 내부에 배치되고 증착 물질을 수납하는 도전성 도가니; 상기 도전성 도가니에 장착되고 복수의 관통 노즐들을 포함하는 노즐 블록; 상기 노즐 블록과 상기 증착 물질 사이에 배치되고 개구부를 통하여 상기 증착 물질의 증기를 확산시키는 도전성 확산판; 및 상기 도전성 도가니 및 상기 노즐 블록을 감싸도록 배치되어 상기 도전성 도가니, 상기 도전성 확산판, 및 상기 노즐 블록을 유도 가열하는 유도 가열 코일;을 포함한다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)