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1. (WO2017069369) LINEAR EVAPORATION DEPOSITION APPARATUS

Pub. No.:    WO/2017/069369    International Application No.:    PCT/KR2016/006114
Publication Date: Fri Apr 28 01:59:59 CEST 2017 International Filing Date: Fri Jun 10 01:59:59 CEST 2016
IPC: H01L 51/56
H01L 51/00
C23C 14/24
C23C 14/26
C23C 14/50
C23C 14/12
H01L 21/203
C23C 14/56
H01L 21/324
Applicants: FINEVA. INC.
주식회사 파인에바
Inventors: KIM, Jung-Hyung
김정형
SEO, In-Yong
서인용
Title: LINEAR EVAPORATION DEPOSITION APPARATUS
Abstract:
The present invention provides a linear evaporation deposition apparatus. The linear evaporation deposition apparatus comprises: a vacuum container; a conductive crucible which extends in a first direction, is disposed inside the vacuum container, and receives a deposition material; a nozzle block mounted on the conductive crucible and including a plurality of penetrating nozzles; a conductive diffusion plate disposed between the nozzle block and the deposition material and diffusing vapor of the deposition material through an opening; and an induction heating coil arranged to surround the conductive crucible and the nozzle block so as to heat the conductive crucible, the conductive diffusion plate, and the nozzle block through induction heating.