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|1. (WO2017069369) LINEAR EVAPORATION DEPOSITION APPARATUS|
|Title:||LINEAR EVAPORATION DEPOSITION APPARATUS|
The present invention provides a linear evaporation deposition apparatus. The linear evaporation deposition apparatus comprises: a vacuum container; a conductive crucible which extends in a first direction, is disposed inside the vacuum container, and receives a deposition material; a nozzle block mounted on the conductive crucible and including a plurality of penetrating nozzles; a conductive diffusion plate disposed between the nozzle block and the deposition material and diffusing vapor of the deposition material through an opening; and an induction heating coil arranged to surround the conductive crucible and the nozzle block so as to heat the conductive crucible, the conductive diffusion plate, and the nozzle block through induction heating.