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1. (WO2017067307) METHOD FOR MANUFACTURING COMPOSITE MAGNETIC MASK PLATE FOR VAPOR DEPOSITION

Pub. No.:    WO/2017/067307    International Application No.:    PCT/CN2016/095614
Publication Date: Fri Apr 28 01:59:59 CEST 2017 International Filing Date: Thu Aug 18 01:59:59 CEST 2016
IPC: C23C 14/04
Applicants: KUN SHAN POWER STENCIL CO., LTD.
昆山允升吉光电科技有限公司
Inventors: WEI, Zhiling
魏志凌
Title: METHOD FOR MANUFACTURING COMPOSITE MAGNETIC MASK PLATE FOR VAPOR DEPOSITION
Abstract:
A method for manufacturing a composite magnetic mask plate (30) for vapor deposition comprises: S1, manufacturing a metal supporting layer (41) in an electroforming manner; S2, covering the surface of the metal supporting layer (41) by using a film; S3, exposing a photoresist film layer (42); and S4, developing the photoresist film layer (42).