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1. (WO2017066546) VERSATILE PROCESS FOR PRECISION NANOSCALE MANUFACTURING

Pub. No.:    WO/2017/066546    International Application No.:    PCT/US2016/057008
Publication Date: Fri Apr 21 01:59:59 CEST 2017 International Filing Date: Sat Oct 15 01:59:59 CEST 2016
IPC: B05D 1/40
B05D 1/42
B28B 11/04
B28B 11/08
Applicants: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
Inventors: SREENIVASAN, Sidlgata, V.
SINGHAL, Shrawan
Title: VERSATILE PROCESS FOR PRECISION NANOSCALE MANUFACTURING
Abstract:
A method for depositing thin films using a nominally curved substrate. Drops of a precursor liquid organic material are dispensed at a plurality of locations on a nominally curved substrate by one or more inkjets. A superstrate is brought down on the dispensed drops to close the gap between the superstrate and the substrate thereby allowing the drops to form a contiguous film captured between the substrate and the superstrate. A non-equilibrium transient state of the superstrate, the contiguous film and the substrate is enabled to occur after a duration of time. The contiguous film is then cured to solidify it into a solid. The solid is separated from the superstrate thereby leaving a polymer film on the substrate. In this manner, such a technique for film deposition has the film thickness range, resolution and variation required to be applicable for a broad spectrum of applications.