WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2017066311) SUBSTRATE CARRIER FOR ACTIVE/PASSIVE BONDING AND DE-BONDING OF A SUBSTRATE
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2017/066311 International Application No.: PCT/US2016/056623
Publication Date: 20.04.2017 International Filing Date: 12.10.2016
IPC:
H01L 21/687 (2006.01) ,H01L 21/683 (2006.01) ,H01L 21/56 (2006.01)
Applicants: APPLIED MATERIALS, INC.[US/US]; 3050 Bowers Avenue Santa Clara, California 95054, US
Inventors: LEW, Jen Sern; SG
THIRUNAVUKARASU, Sriskantharajah; SG
Agent: TABOADA, Alan; US
MOSER, JR., Raymond R.; US
LINARDAKIS, Leonard P.; US
Priority Data:
62/240,48912.10.2015US
Title (EN) SUBSTRATE CARRIER FOR ACTIVE/PASSIVE BONDING AND DE-BONDING OF A SUBSTRATE
(FR) PORTE-SUBSTRAT POUR COLLAGE ET DÉCOLLEMENT ACTIF/PASSIF D'UN SUBSTRAT
Abstract: front page image
(EN) Embodiments of substrate carriers which enable active/passive bonding and de-bonding of a substrate are provided herein. In some embodiments, a substrate carrier for holding a substrate comprises a disk formed of a porous material, the disk being formed symmetrically about a central axis and defining a substantially planar upper surface and an exposed opposing lower surface. In some embodiments, the porous material is silicon carbide and the substrate carrier includes a semi-porous surface coating formed atop the upper surface of the disk.
(FR) Selon divers modes de réalisation, l'invention concerne des porte-substrats qui permettent un collage et le décollement actif/passif d'un substrat. Dans certains modes de réalisation, un porte-substrat destiné à tenir un substrat comprend un disque formé d'un matériau poreux, le disque étant formé symétriquement autour d'un axe central et définissant une surface supérieure sensiblement plane et une surface inférieure opposée apparente. Dans certains modes de réalisation, le matériau poreux est du carbure de silicium et le porte-substrat comprend un revêtement de surface semi-poreux, formé au-dessus de la surface supérieure du disque.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)