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Machine translation
1. (WO2017065005) ADHESIVE TAPE AFFIXING METHOD AND ADHESIVE TAPE AFFIXING DEVICE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2017/065005    International Application No.:    PCT/JP2016/078490
Publication Date: 20.04.2017 International Filing Date: 27.09.2016
IPC:
H01L 21/683 (2006.01)
Applicants: NITTO DENKO CORPORATION [JP/JP]; 1-2, Shimohozumi 1-chome, Ibaraki-shi, Osaka 5678680 (JP)
Inventors: MURAYAMA Akihiro; (JP)
Agent: SUGITANI Tsutomu; (JP)
Priority Data:
2015-201878 13.10.2015 JP
Title (EN) ADHESIVE TAPE AFFIXING METHOD AND ADHESIVE TAPE AFFIXING DEVICE
(FR) PROCÉDÉ DE FIXATION DE RUBAN ADHÉSIF ET DISPOSITIF DE FIXATION DE RUBAN ADHÉSIF
(JA) 粘着テープ貼付け方法および粘着テープ貼付け装置
Abstract: front page image
(EN)The outer periphery of a wafer W is heated via a ring-shaped holding part 51 of a holding table 5 that holds the outer periphery of the wafer W. From the center of the holding table 5 toward the outer periphery, a heated gas is supplied between the wafer W and a ring-shaped protruding part 52, which closely faces the wafer W between the holding part 51 and the center of the holding table 5. As the entire wafer surface is uniformly heated and pressurized, an adhesive tape is pressed by an affixing roller and affixed to the wafer W.
(FR)La périphérie externe d'une tranche W est chauffée par l'intermédiaire d'une partie de retenue annulaire 51 d'une table de retenue 5 qui maintient la périphérie externe de la tranche W. Du centre de la table de retenue 5 vers la périphérie externe, un gaz chauffé est fourni entre la tranche W et une partie en saillie annulaire 52, qui fait étroitement face à la tranche W entre la partie de retenue 51 et le centre de la table de retenue 5. Au fur et à mesure que toute la surface de la tranche est uniformément chauffée et mise sous pression, un ruban adhésif est pressé par un rouleau de fixation et fixé à la tranche W.
(JA)ウエハWの外周を保持する保持テーブル5の環状の保持部51を介して当該ウエハWの外周を加熱するとともに、保持テーブル5の中央と保持部51の間でウエハWと近接対向する環状の隆起部52と当該ウエハWの間に、保持テーブル5の中心から外周に向けて加熱された気体を供給し、ウエハ全面を均一に加熱および加圧しながら粘着テープを貼付けローラで押圧して貼り付ける。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)