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1. (WO2017064354) LINKED MICROMECHANICAL POSITIONING APPARATUS FOR REAL-TIME TESTING AND MEASUREMENT

Pub. No.:    WO/2017/064354    International Application No.:    PCT/FI2015/050689
Publication Date: Fri Apr 21 01:59:59 CEST 2017 International Filing Date: Wed Oct 14 01:59:59 CEST 2015
IPC: G01Q 20/00
B82Y 35/00
B25J 7/00
G02B 21/32
B81B 3/00
Applicants: SENSAPEX OY
Inventors: VÄHÄSÖYRINKI, Mikko
VIMPARI, Markku
Title: LINKED MICROMECHANICAL POSITIONING APPARATUS FOR REAL-TIME TESTING AND MEASUREMENT
Abstract:
The invention relates to a positioning device (120, 154), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a probe (150, 151) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the positioning controller (145) having a steering input (156) for receiving a steering signal to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the steering signal. The measurement device may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said steering signal and said positioning control instructions (300).