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1. (WO2017064113) METAL FREE GRAPHENE SYNTHESIS ON INSULATING OR SEMICONDUCTING SUBSTRATES
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2017/064113 International Application No.: PCT/EP2016/074448
Publication Date: 20.04.2017 International Filing Date: 12.10.2016
IPC:
B82Y 30/00 (2011.01) ,B82Y 40/00 (2011.01) ,C23C 16/02 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
82
NANO-TECHNOLOGY
Y
SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES
30
Nano-technology for materials or surface science, e.g. nano-composites
B PERFORMING OPERATIONS; TRANSPORTING
82
NANO-TECHNOLOGY
Y
SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES
40
Manufacture or treatment of nano-structures
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
02
Pretreatment of the material to be coated
Applicants: BASF SE[DE/DE]; Carl-Bosch-Str. 38 67056 Ludwigshafen am Rhein, DE
Inventors: TOMOVIC, Zeljko; DE
WEBER, Nils-Eike; DE
BINDER, Axel; DE
WAGNER, Norbert; DE
Agent: MAIWALD PATENTANWALTS GMBH; Christian, HAGGENMÜLLER Postfach 33 05 23 80065 München, DE
Priority Data:
15189986.115.10.2015EP
Title (EN) METAL FREE GRAPHENE SYNTHESIS ON INSULATING OR SEMICONDUCTING SUBSTRATES
(FR) SYNTHÈSE DE GRAPHÈNE SANS MÉTAL SUR DES SUBSTRATS ISOLANTS OU SEMI-CONDUCTEURS
Abstract:
(EN) The present invention relates to a process for preparing graphene by chemical vapour deposition (CVD), wherein an insulating or semiconducting inorganic substrate is provided in a chemical vapour deposition (CVD) reactor and subjected to a thermal pre-treatment in a hydrogen-containing atmosphere,and graphene is deposited on the inorganic substrate by bringing a gaseous oxidant and a carbon-containing precursor into contact with the inorganic substrate.
(FR) La présente invention concerne un procédé de préparation de graphène par dépôt chimique en phase vapeur (CVD), un substrat inorganique isolant ou semi-conducteur étant utilisé dans un réacteur de dépôt chimique en phase vapeur (CVD) et soumis à un prétraitement thermique dans une atmosphère contenant de l'hydrogène, et du graphène étant déposé sur le substrat inorganique en mettant en contact un oxydant gazeux et un précurseur contenant du carbone avec le substrat inorganique.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)