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|1. (WO2017062202) CARRIER-SUBSTRATE ADHESIVE SYSTEM|
|Applicants:||MASSACHUSETTS INSTITUTE OF TECHNOLOGY
|Inventors:||SMITH, Henry I.
FUCETOLA, Corey P.
MIRICA, Katherine A.
FUCETOLA, Jay J.
FREEMAN, Dakota S.
|Title:||CARRIER-SUBSTRATE ADHESIVE SYSTEM|
A system and method for creating three-dimensional nanostructures is disclosed. The system includes a substrate bonded to a carrier using a bonding agent. The bonding agent may be vaporizable or sublimable. The carrier may be a glass or glass-like substance. In some embodiments, the carrier may be permeable having one or a plurality of pores through which the bonding agent may escape when converted to a gaseous state with heat, pressure, light or other methods. A substrate is bonded to the carrier using the bonding agent. The substrate is then processed to form a membrane. This processing may include grinding, polishing, etching, patterning, or other steps. The processed membrane is then aligned and affixed to a receiving substrate, or a previously deposited membrane. Once properly attached, the bonding agent is then heated, depressurized or otherwise caused to sublimate or vaporize, thereby releasing the processed membrane from the carrier.