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1. (WO2017062087) SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION

Pub. No.:    WO/2017/062087    International Application No.:    PCT/US2016/044080
Publication Date: Fri Apr 14 01:59:59 CEST 2017 International Filing Date: Wed Jul 27 01:59:59 CEST 2016
IPC: H01L 21/02
H01L 21/205
H05H 1/46
Applicants: APPLIED MATERIALS, INC.
Inventors: WANG, Haitao
NOORBAKHSH, Hamid
ZHANG, Chunlei
SHOJI, Sergio Fukuda
RAMASWAMY, Kartik
SMITH, Roland
MAYS, Brad L.
Title: SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION
Abstract:
Embodiments of the present disclosure relate to a showerhead assembly for use in a processing chamber. The showerhead assembly includes a porous insert disposed in a space defined between a gas distribution plate and a base plate to moderate the corrosive radicals resulting from plasma ignition to reduce particle issues and metal contamination in the chamber. The porous insert is a conductive material, such as metal, used to reduce the gap electrical field strength, or may be a dielectric material such as ceramic, polytetrafluoroethylene, polyamide-imide, or other materials with a low dielectric loss and high electrical field strength under conditions of high frequency and strong electric fields. As such, the electrical breakdown threshold is enhanced. The porous insert may reduce and/or eliminate showerhead backside plasma ignition and may include multiple concentric narrow rings that cover gas holes of the gas distribution plate.