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1. (WO2017062060) IN-SITU LASER ASSISTED PROCESSES IN FOCUSED ION BEAM APPLICATIONS

Pub. No.:    WO/2017/062060    International Application No.:    PCT/US2016/025223
Publication Date: Fri Apr 14 01:59:59 CEST 2017 International Filing Date: Fri Apr 01 01:59:59 CEST 2016
IPC: H01L 21/027
H01L 21/268
Applicants: INTEL CORPORATION
Inventors: TAN, Shida
LIVENGOOD, Richard H.
Title: IN-SITU LASER ASSISTED PROCESSES IN FOCUSED ION BEAM APPLICATIONS
Abstract:
In-situ laser assisted processes in focused ion beam applications are described. In an example, a method of patterning, milling, or imaging a sample involves providing real time localized substrate heating using a pulsed focused laser beam that irradiates the sample simultaneously as the ion beam is used during the patterning, milling, or imaging. Other embodiments may be described and/or claimed.