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1. (WO2017062060) IN-SITU LASER ASSISTED PROCESSES IN FOCUSED ION BEAM APPLICATIONS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2017/062060    International Application No.:    PCT/US2016/025223
Publication Date: 13.04.2017 International Filing Date: 31.03.2016
IPC:
H01L 21/027 (2006.01), H01L 21/268 (2006.01)
Applicants: INTEL CORPORATION [US/US]; 2200 Mission College Boulevard Santa Clara, California 95054 (US)
Inventors: TAN, Shida; (US).
LIVENGOOD, Richard H.; (US)
Agent: PARKER, Wesley E.; (US)
Priority Data:
62/238,619 07.10.2015 US
Title (EN) IN-SITU LASER ASSISTED PROCESSES IN FOCUSED ION BEAM APPLICATIONS
(FR) TRAITEMENTS ASSISTÉS PAR LASER IN-SITU DANS DES APPLICATIONS DE FAISCEAU D'IONS FOCALISÉ
Abstract: front page image
(EN)In-situ laser assisted processes in focused ion beam applications are described. In an example, a method of patterning, milling, or imaging a sample involves providing real time localized substrate heating using a pulsed focused laser beam that irradiates the sample simultaneously as the ion beam is used during the patterning, milling, or imaging. Other embodiments may be described and/or claimed.
(FR)L'invention concerne des traitements assistés par laser in-situ dans des applications de faisceau d'ions focalisé. Dans un exemple, un procédé de formation de motifs, de fraisage ou d'imagerie d'un échantillon consiste à fournir en temps réel à un substrat localisé un chauffage à l'aide d'un faisceau laser focalisé pulsé qui irradie l'échantillon en même temps que le faisceau d'ions est utilisé au cours de la formation de motifs, du fraisage ou de l'imagerie. D'autres modes de réalisation peuvent être décrits et/ou revendiqués.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)