Search International and National Patent Collections

1. (WO2017061739) CRYOGENIC PROBE STATION

Pub. No.:    WO/2017/061739    International Application No.:    PCT/KR2016/011028
Publication Date: Fri Apr 14 01:59:59 CEST 2017 International Filing Date: Sat Oct 01 01:59:59 CEST 2016
IPC: G01R 1/067
G01R 31/28
Applicants: KOREA BASIC SCIENCE INSTITUTE
한국기초과학지원연구원
Inventors: PARK, Seung Young
박승영
CHOI, Yeon Suk
최연석
JO, Young Hun
조영훈
Title: CRYOGENIC PROBE STATION
Abstract:
The present invention relates to a cryogenic probe station capable of obtaining continuous data regardless of a temperature sweep by enabling a cabling-type stage, in addition to a conventional probe contact-type stage, to be used. The cryogenic probe station according to the present invention comprises: a vacuum chamber configured to create a vacuum atmosphere; a cabling-type stage mounted inside the vacuum chamber so as to support a sample to be measured from a lower part thereof and to apply and sense an electrical signal; a stage accommodation part having an accommodation groove formed so as to enable the cabling-type stage to be accommodated and separated; a cryogenic heat absorption unit configured to provide cryogenic cool air to the stage accommodation part through a thermal conductor; and a magnetic field generation unit provided to be spaced at a predetermined distance from the stage accommodation part, so as to generate a magnetic field.