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|1. (WO2017061636) MEMS DEVICE PREPARATION METHOD, MEMS PACKAGE AND USER TERMINAL|
|Applicants:||STANDING EGG INC.
|Title:||MEMS DEVICE PREPARATION METHOD, MEMS PACKAGE AND USER TERMINAL|
Provided are a MEMS device preparation method, a MEMS package and a user terminal. The MEMS device preparation method comprises the steps of: providing a substrate comprising a silicon oxide layer and a silicon layer which is formed on the silicon oxide layer; forming a hard mask pattern on the silicon layer; reducing the thickness of an area requiring a step-shaped portion in the hard mask pattern; forming a MEMS structure pattern by means of primary etching the silicon layer by using the hard mask pattern; forming a step-shaped portion on the MEMS structure pattern by means of secondary etching the MEMS structure pattern by using the hard mask pattern; and completing a movable MEMS structure by means of removing a part of the silicon oxide layer.