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1. (WO2017061636) MEMS DEVICE PREPARATION METHOD, MEMS PACKAGE AND USER TERMINAL

Pub. No.:    WO/2017/061636    International Application No.:    PCT/KR2015/010526
Publication Date: Fri Apr 14 01:59:59 CEST 2017 International Filing Date: Wed Oct 07 01:59:59 CEST 2015
IPC: B81C 1/00
B81B 7/02
H01L 21/027
G01P 15/08
Applicants: STANDING EGG INC.
주식회사 스탠딩에그
Inventors: SEO, Pyungbo
서평보
MOON, Sanghee
문상희
LEE, Jongsung
이종성
Title: MEMS DEVICE PREPARATION METHOD, MEMS PACKAGE AND USER TERMINAL
Abstract:
Provided are a MEMS device preparation method, a MEMS package and a user terminal. The MEMS device preparation method comprises the steps of: providing a substrate comprising a silicon oxide layer and a silicon layer which is formed on the silicon oxide layer; forming a hard mask pattern on the silicon layer; reducing the thickness of an area requiring a step-shaped portion in the hard mask pattern; forming a MEMS structure pattern by means of primary etching the silicon layer by using the hard mask pattern; forming a step-shaped portion on the MEMS structure pattern by means of secondary etching the MEMS structure pattern by using the hard mask pattern; and completing a movable MEMS structure by means of removing a part of the silicon oxide layer.