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1. (WO2017060656) PROCESS FOR GRAFTING A POLYMERIC THIN FILM ONTO A SUBSTRATE AND PROCESS FOR METALLIZING THIS THIN FILM
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/060656 International Application No.: PCT/FR2016/052605
Publication Date: 13.04.2017 International Filing Date: 07.10.2016
IPC:
B05D 1/18 (2006.01) ,C23C 18/18 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
05
SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
D
PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
1
Processes for applying liquids or other fluent materials
18
performed by dipping
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
18
Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
16
by reduction or substitution, i.e. electroless plating
18
Pretreatment of the material to be coated
Applicants:
AVENI [FR/FR]; 15 rue du Buisson aux Fraises Z.I. de la Bonde 91300 Massy, FR
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES [FR/FR]; Bâtiment Le Ponant D 25 rue Leblanc 75015 Paris, FR
Inventors:
VIEL, Pascal; FR
SUHR, Dominique; FR
BARRAL, Geoffrey; FR
Agent:
CHANTRAINE, Sylvie; FR
HUBERT, Philippe; FR
HART-DAVIS, Jason; FR
LE ROUX, Martine; FR
MARRO, Nicolas; FR
MENA, Sandra; FR
MENDELSOHN, Isabelle; FR
NEVANT, Marc; FR
Priority Data:
155959608.10.2015FR
Title (EN) PROCESS FOR GRAFTING A POLYMERIC THIN FILM ONTO A SUBSTRATE AND PROCESS FOR METALLIZING THIS THIN FILM
(FR) PROCEDE DE GREFFAGE DE FILM MINCE POLYMERIQUE SUR SUBSTRAT ET PROCEDE DE METALLISATION DE CE FILM MINCE
Abstract:
(EN) One subject of the present invention is a non-electrochemical process for radical grafting of a polymer to a solid, organic or inorganic and insulating, electrically conductive or electrically semiconductive substrate, which process comprises - bringing said substrate into contact with the polymer in solution via an immersion-emersion, a contact coating, or a spray coating, and - heat treating the polymer-covered substrate obtained in the preceding step at a temperature between 70°C and 450°C; said polymer not being a polymer based on acrylic acid. The invention also relates to a process for metallizing the solid, organic or inorganic substrate coated by the polymer film, which metallizing may be carried out via a dry or wet route. This process particularly finds an application in the metallization of through vias for the manufacture of semiconductor devices.
(FR) La présente invention a pour objet un procédé non électrochimique de greffage, par voie radicalaire, d'un polymère sur un substrat solide, organique ou inorganique et isolant, conducteur de l'électricité, ou semi-conducteur de l'électricité, lequel procédé comprend - la mise en contact dudit substrat avec le polymère en solution par une immersion - émersion, une enduction par contact, ou une enduction par projection, et - un traitement thermique du substrat recouvert de polymère obtenu à l'étape précédente à une température comprise entre 70 et 450 °C; ledit polymère n'étant pas un polymère à base d'acide acrylique. L'invention concerne également un procédé de métallisation du substrat solide organique ou inorganique revêtu par le film de polymère, laquelle métallisation peut être réalisée par voie sèche ou humide. Ce procédé trouve particulièrement application dans la métallisation de vias traversants pour la fabrication de dispositifs semi-conducteurs.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: French (FR)
Filing Language: French (FR)
Also published as:
EP3359306