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1. (WO2017059056) MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES

Pub. No.:    WO/2017/059056    International Application No.:    PCT/US2016/054416
Publication Date: Fri Apr 07 01:59:59 CEST 2017 International Filing Date: Fri Sep 30 01:59:59 CEST 2016
IPC: B81B 7/04
B81B 5/00
B81B 3/00
Applicants: MEMS DRIVE, INC.
Inventors: GUTIERREZ, Roman
TANG, Tony
LIU, Xiaolei
WANG, Guiqin
NG, Matthew
Title: MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES
Abstract:
A system and method for manipulating the structural characteristics of a MEMS device including etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structrual characteristics desired in the MEMS device.