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1. (WO2017056947) METAL-CONTAMINATION PREVENTIVE AGENT, METAL-CONTAMINATION PREVENTIVE MEMBRANE, METAL-CONTAMINATION PREVENTIVE METHOD, AND PRODUCT-CLEANSING METHOD
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Pub. No.: WO/2017/056947 International Application No.: PCT/JP2016/076823
Publication Date: 06.04.2017 International Filing Date: 12.09.2016
IPC:
C02F 1/42 (2006.01) ,B01J 39/04 (2017.01) ,B01J 41/04 (2017.01) ,B01J 47/12 (2017.01) ,C02F 1/44 (2006.01) ,C02F 1/62 (2006.01) ,H01L 21/304 (2006.01)
C CHEMISTRY; METALLURGY
02
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
F
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
1
Treatment of water, waste water, or sewage
42
by ion-exchange
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
J
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
39
Cation exchange; Use of material as cation exchangers; Treatment of material for improving the cation exchange properties
04
Processes using organic exchangers
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
J
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
41
Anion exchange; Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
04
Processes using organic exchangers
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
J
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
47
Ion-exchange processes in general; Apparatus therefor
12
characterised by the use of ion-exchange material in the form of sheets, ribbons or filaments, e.g. membranes
C CHEMISTRY; METALLURGY
02
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
F
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
1
Treatment of water, waste water, or sewage
44
by dialysis, osmosis or reverse osmosis
C CHEMISTRY; METALLURGY
02
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
F
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
1
Treatment of water, waste water, or sewage
58
by removing specified dissolved compounds
62
Heavy metal compounds
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
04
the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18
the devices having semiconductor bodies comprising elements of the fourth group of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
30
Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20-H01L21/26142
302
to change the physical characteristics of their surfaces, or to change their shape, e.g. etching, polishing, cutting
304
Mechanical treatment, e.g. grinding, polishing, cutting
Applicants: KURITA WATER INDUSTRIES LTD.[JP/JP]; 10-1, Nakano 4-chome, Nakano-ku, Tokyo 1640001, JP
Inventors: MORITA, Hiroshi; JP
KATO, Toshimasa; JP
HOSHI, Shigeyuki; JP
Agent: SHIGENO, Tsuyoshi; JP
SHIGENO, Takayuki; JP
Priority Data:
2015-19379930.09.2015JP
Title (EN) METAL-CONTAMINATION PREVENTIVE AGENT, METAL-CONTAMINATION PREVENTIVE MEMBRANE, METAL-CONTAMINATION PREVENTIVE METHOD, AND PRODUCT-CLEANSING METHOD
(FR) AGENT DE PRÉVENTION DE CONTAMINATION MÉTALLIQUE, MEMBRANE DE PRÉVENTION DE CONTAMINATION MÉTALLIQUE, PROCÉDÉ DE PRÉVENTION DE CONTAMINATION MÉTALLIQUE ET PROCÉDÉ DE NETTOYAGE DE PRODUITS
(JA) 金属汚染防止剤、金属汚染防止膜、金属汚染防止方法及び製品洗浄方法
Abstract:
(EN) The present invention reduces the adhesiveness of trace metals in ultrapure water for cleansing products, and inhibits the metal contamination of an object to be cleansed. Provided is a metal-contamination preventive agent that contains a polymer having an ion-exchange group, such as a polystyrene sulfonate having a molecular weight of at least 100,000. Trace metals in ultrapure water are adsorbed through an ion-exchange reaction of the polymer having the ion-exchange group, and can thus be inhibited from adhering to products. Also provided is a product-cleansing method for cleansing products with ultrapure water to which said metal-contamination preventive agent has been added. Preferably, the ultrapure water to which the metal-contamination preventive agent has been added flows through a separation membrane module, and the products are cleansed with the membrane-permeated water.
(FR) La présente invention réduit l'adhérence de métaux en traces dans l'eau ultra pure pour nettoyer des produits et empêche la contamination métallique d'un objet qui doit être nettoyé. L'invention concerne un agent de prévention de contamination métallique qui contient un polymère ayant un groupe d'échange d'ions, tel qu'un sulfonate de polystyrène présentant un poids moléculaire d'au moins 100 000. Des métaux en traces dans l'eau ultra pure sont adsorbés par le biais d'une réaction d'échange d'ions du polymère ayant le groupe d'échange d'ions et ne peuvent donc pas adhérer à des produits. L'invention concerne également un procédé de nettoyage de produits permettant de nettoyer des produits avec une eau ultra pure à laquelle ledit agent de prévention de contamination métallique a été ajouté. De préférence, l'eau ultra pure à laquelle l'agent de prévention de contamination métallique a été ajouté, s'écoule à travers un module de membrane de séparation et les produits sont nettoyés avec l'eau de perméation de membrane.
(JA) 製品洗浄用の超純水中の微量金属の付着性を低減し、洗浄対象の金属汚染を抑制する。分子量10万以上のポリスチレンスルホン酸等のイオン交換基を有するポリマーを含有する金属汚染防止剤。超純水中の微量金属を、イオン交換基を有するポリマーがイオン交換反応で吸着して製品への付着を抑制することができる。この金属汚染防止剤を添加した超純水で製品を洗浄する製品洗浄方法。好ましくは、金属汚染防止剤を添加した超純水を分離膜モジュールに通水し、膜透過水で製品を洗浄する。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)