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1. (WO2017056835) SAMPLE HOLDER

Pub. No.:    WO/2017/056835    International Application No.:    PCT/JP2016/075464
Publication Date: Fri Apr 07 01:59:59 CEST 2017 International Filing Date: Thu Sep 01 01:59:59 CEST 2016
IPC: H01L 21/683
Inventors: TSURUMARU, Takafumi
鶴丸 尚文
This sample holder is provided with: a base which contains a ceramic and has a sample holding surface in the upper surface; a supporting body which contains a metal and has an upper surface that supports the lower surface of the base; and a bonding layer that joins the lower surface of the base and the upper surface of the supporting body with each other. The bonding layer has a first portion, at least a part of which is provided in the central part of the bonding layer, and a second portion which is positioned on the outer periphery of the bonding layer and is adjacent to the first portion, while having a thermal conductivity different from that of the first portion. In a cross-section perpendicular to the sample holding surface, the boundary between the first portion and the second portion is inclined with respect to the direction perpendicular to the sample holding surface.