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1. (WO2017054123) METHOD OF MAKING GRAPHITIC CARBON SHEET
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2017/054123 International Application No.: PCT/CN2015/091043
Publication Date: 06.04.2017 International Filing Date: 29.09.2015
IPC:
H01L 21/033 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
027
Making masks on semiconductor bodies for further photolithographic processing, not provided for in group H01L21/18 or H01L21/34165
033
comprising inorganic layers
Applicants:
WANG, Deyan [US/US]; US (SC)
WANG, Xiuyan [CN/CN]; CN (SC)
FENG, Shaoguang [US/CN]; CN (SC)
LI, Qiaowei [CN/CN]; CN (SC)
PANG, Qingqing [CN/CN]; CN (SC)
TREFONAS, Peter III [US/US]; US (SC)
CHEN, Hongyu [US/CN]; CN (SC)
ROHM AND HAAS ELECTRONIC MATERIALS LLC [US/US]; 455 Forest Street Marlborough, MA 01752, US
DOW GLOBAL TECHNOLOGIES LLC [US/US]; 2040 Dow Center Midland, MI 48674, US
Inventors:
WANG, Deyan; US
WANG, Xiuyan; CN
FENG, Shaoguang; CN
LI, Qiaowei; CN
PANG, Qingqing; CN
TREFONAS, Peter III; US
CHEN, Hongyu; CN
Agent:
SHANGHAI PATENT & TRADEMARK LAW OFFICE, LLC; 435 Guiping Road Shanghai 200233, CN
Priority Data:
Title (EN) METHOD OF MAKING GRAPHITIC CARBON SHEET
(FR) PROCÉDÉ DE FABRICATION D'UNE FEUILLE DE GRAPHITE
Abstract:
(EN) A method of making a graphitic carbon sheet is provided, comprising providing a substrate; providing a coating composition, comprising: a liquid carrier and a MX/graphitic carbon precursor material having a formula (I); disposing the coating composition on the substrate to form a composite; optionally, baking the composite; annealing the composite under a forming gas atmosphere; whereby the composite is converted into an MX layer and a graphitic carbon layer disposed on the substrate providing a multilayer structure; wherein the MX layer is interposed between the substrate and the graphitic carbon layer in the multilayer structure; exposing the multilayer structure to an acid; and, recovering the graphitic carbon layer as the freestanding graphitic carbon sheet.
(FR) L'invention concerne un procédé de fabrication d'une feuille de graphite, consistant à utiliser un substrat ; à utiliser une composition de revêtement, comprenant : un support liquide et un matériau précurseur de MX/graphite ayant une formule (I) ; à disposer la composition de revêtement sur le substrat pour former un composite ; éventuellement, à cuire le composite ; à recuire le composite sous une atmosphère de gaz de formation ; de sorte que le composite est converti en une couche de MX et en une couche de graphite disposées sur le substrat offrant une structure multicouche ; laquelle couche de MX est intercalée entre le substrat et la couche de graphite dans la structure multicouche ; à exposer la structure multicouche à un acide ; et à récupérer la couche de graphite en tant que feuille de graphite autonome.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)