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1. (WO2017041470) ACIDIC ETCHING WASTE SOLUTION REUSE AND RECOVERY SYSTEM HAVING TAIL-GAS TREATMENT FUNCTION
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2017/041470 International Application No.: PCT/CN2016/077064
Publication Date: 16.03.2017 International Filing Date: 23.03.2016
IPC:
C23F 1/46 (2006.01) ,C23F 1/34 (2006.01) ,C25C 1/12 (2006.01) ,C25B 1/26 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
F
NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES; INHIBITING CORROSION OF METALLIC MATERIAL; INHIBITING INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25247
1
Etching metallic material by chemical means
46
Regeneration of etching compositions
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
F
NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES; INHIBITING CORROSION OF METALLIC MATERIAL; INHIBITING INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25247
1
Etching metallic material by chemical means
10
Etching compositions
14
Aqueous compositions
32
Alkaline compositions
34
for etching copper or alloys thereof
C CHEMISTRY; METALLURGY
25
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
C
PROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
1
Electrolytic production, recovery or refining of metals by electrolysis of solutions
12
of copper
C CHEMISTRY; METALLURGY
25
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
B
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON- METALS; APPARATUS THEREFOR
1
Electrolytic production of inorganic compounds or non-metals
24
of halogens or compounds thereof
26
Chlorine; Compounds thereof
Applicants:
成都虹华环保科技股份有限公司 CHENGDU HONGHUA ENVIRONMENTAL SCIENCE & TECHNOLOGY CO., LTD [CN/CN]; 中国四川省成都市 高新区西芯大道4号 No.4, Xixin Rd, Hi-Tech Industrial Development Zone Chengdu, Sichuan 610000, CN
Inventors:
韦建敏 WEI, Janmin; CN
吴梅 WU, Mei; CN
赵兴文 ZHAO, Xingwen; CN
张晓蓓 ZHANG, Xiaobei; CN
张小波 ZHANG, Xiaobo; CN
Agent:
成都金英专利代理事务所 CHENGDU JINYING PATENT FIRM; 中国四川省成都市 青羊区光华东三路489号西环广场1栋12层 12/F, Bldg 1, Xihuan Plaza No.489, the Third Guanghua Eastern Road, Qingyang District Chengdu, Sichuan 610072, CN
Priority Data:
201510569176.309.09.2015CN
201520694115.509.09.2015CN
Title (EN) ACIDIC ETCHING WASTE SOLUTION REUSE AND RECOVERY SYSTEM HAVING TAIL-GAS TREATMENT FUNCTION
(FR) SYSTÈME DE RÉCUPÉRATION ET DE RÉUTILISATION DE SOLUTION RÉSIDUAIRE DE GRAVURE À L'ACIDE AYANT UNE FONCTION DE TRAITEMENT DES GAZ DE QUEUE
(ZH) 一种具有尾气处理功能的酸性蚀刻废液循环再生系统
Abstract:
(EN) An acidic etching waste solution reuse and recovery system having a tail-gas treatment function comprises: an etching solution treatment system; and a chlorine gas recycling system. The etching solution treatment system comprises: an etching production line (1); a mother liquor storage tank (2); an electrolytic cell; and a dissolution and absorption system (6). The electrolytic cell comprises a cathode compartment (3) and an anode compartment (5). The mother liquor storage tank (2), the cathode compartment (3), the anode compartment (5) and the dissolution and absorption system (6) sequentially communicate with each other. The etching production line (1) respectively communicates with the mother liquor storage tank (2) and the dissolution and absorption system (6). The chlorine gas recycling system comprises a gas-scrubbing system (7) and a tail-gas treatment system (8). The anode compartment (5), the gas-scrubbing system (7) and the tail-gas treatment system (8) sequentially communicate with each other. The acidic etching waste solution reuse and recovery system is configured to treat an acidic etching waste solution, and can perform an off-line production operation, save costs and resources, and prevent environmental pollution.
(FR) Cette invention concerne un système de récupération et de réutilisation de solution résiduaire de gravure à l'acide ayant une fonction de traitement des gaz de queue, comprenant : un système de traitement de solution de gravure ; et un système de recyclage de gaz de chlore. Ledit système de traitement de solution de gravure comprend : une ligne de production de gravure (1) ; un réservoir de stockage de liqueur mère (2) ; une cellule électrolytique ; et un système d'absorption et de dissolution (6). Ladite cellule électrolytique comprend un compartiment de cathode (3) et un compartiment d'anode (5). Le réservoir de stockage de liqueur mère (2), le compartiment de cathode (3), le compartiment d'anode (5) et le système d'absorption et de dissolution (6) communiquent séquentiellement l'un avec l'autre. Ladite ligne de production de gravure (1) respectivement liqueur mère communique avec le réservoir de stockage (2) et le système d'absorption et de dissolution (6). Ledit système de recyclage de gaz de chlore comprend un système d'épuration de gaz (7) et un système de traitement des gaz de queue (8). Le compartiment d'anode (5), le système d'épuration de gaz (7) et le système de traitement des gaz de queue (8) communiquent séquentiellement l'un avec l'autre. Ledit système de récupération et de réutilisation de solution résiduaire de gravure à l'acide est configuré pour traiter une solution résiduaire de gravure acide, et il peut effectuer une opération de production hors ligne, économiser les coûts et les ressources, et éviter la pollution environnementale.
(ZH) 一种具有尾气处理功能的酸性蚀刻液循环再生系统,包括蚀刻液处理系统和氯气回收系统,蚀刻液处理系统包括蚀刻生产线(1)、母液储存罐(2)、电解槽和溶解吸收系统(6),电解槽包括阴极槽(3)和阳极槽(5),母液储存罐(2)、阴极槽(3)、阳极槽(5)、溶解吸收系统(6)依次连通,蚀刻生产线(1)分别与母液储存罐(2)和溶解吸收系统(6)连通,氯气回收系统包括洗气系统(7)和尾气处理系统(8),阳极槽(5)、洗气系统(7)和尾气处理系统(8)依次连通。该酸性蚀刻液循环再生系统用于处理酸性蚀刻废液,可离线生产、节约成本和资源,防止环境污染。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)