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1. (WO2017041047) METHOD OF IMPROVING LATERAL RESOLUTION FOR HEIGHT SENSOR USING DIFFERENTIAL DETECTION TECHNOLOGY FOR SEMICONDUCTOR INSPECTION AND METROLOGY

Pub. No.:    WO/2017/041047    International Application No.:    PCT/US2016/050281
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Sat Sep 03 01:59:59 CEST 2016
IPC: H01L 21/66
G01N 21/95
Applicants: KLA-TENCOR CORPORATION
Inventors: LI, Shifang
Title: METHOD OF IMPROVING LATERAL RESOLUTION FOR HEIGHT SENSOR USING DIFFERENTIAL DETECTION TECHNOLOGY FOR SEMICONDUCTOR INSPECTION AND METROLOGY
Abstract:
A system that can be used for used for semiconductor height inspection and metrology includes a complementary plate that is used with a beam splitter to create desired astigmatism and to remove chromatic aberration. Simultaneous optimization of lateral resolution and sensitivity can be enabled. The complementary plate can be made of the same material and have the same thickness as the beam splitter.