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1. (WO2017040913) INTERNAL PURGE DIFFUSER WITH OFFSET MANIFOLD

Pub. No.:    WO/2017/040913    International Application No.:    PCT/US2016/050085
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Sat Sep 03 01:59:59 CEST 2016
IPC: H01L 21/673
H01L 21/02
H01L 21/677
B65D 51/16
Applicants: ENTEGRIS, INC.
Inventors: GLAVAN, Kyle
KING, Jeffery J.
FULLER, Matthew
Title: INTERNAL PURGE DIFFUSER WITH OFFSET MANIFOLD
Abstract:
A purge tower assembly for a substrate container. The assembly may include a purge interface body, including a base portion and a top portion, for mounting to a bottom plate of a substrate container. The base portion may include a substantially tubular base sidewall and the top portion may have a top sidewall positioned on the top edge of the base portion. The top portion may include an inlet nozzle for mounting through a rearward inlet in the bottom plate. The inlet nozzle may have a substantially tubular sidewall extending upwardly from the top sidewall and defining an interior of the inlet nozzle. The base portion and the top sidewall may define an offset conduit portion disposed connected to the base portion and the inlet nozzle, the base portion and the inlet nozzle in fluid communication via the offset conduit portion.