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1. (WO2017040634) A MEMS FRAME HEATING PLATFORM FOR ELECTRON IMAGABLE FLUID RESERVOIRS OR LARGER CONDUCTIVE SAMPLES
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Pub. No.: WO/2017/040634 International Application No.: PCT/US2016/049666
Publication Date: 09.03.2017 International Filing Date: 31.08.2016
IPC:
H01J 37/26 (2006.01) ,H01J 37/20 (2006.01)
[IPC code unknown for H01J 37/26][IPC code unknown for H01J 37/20]
Applicants:
PROTOCHIPS, INC. [US/US]; 3800 Gateway Centre Blvd., Suite 306 Morrisville, North Carolina 27560, US
Inventors:
WALDEN II, Franklin Stampley; US
DAMIANO JR., John; US
GARDINER, Daniel Stephen; US
NACKASHI, David P.; US
CARPENTER, William Bradford; US
Agent:
NIFONG, Justin R.; US
Priority Data:
62/212,24131.08.2015US
Title (EN) A MEMS FRAME HEATING PLATFORM FOR ELECTRON IMAGABLE FLUID RESERVOIRS OR LARGER CONDUCTIVE SAMPLES
(FR) PLATE-FORME DE CHAUFFAGE DE STRUCTURE MEMS POUR RÉSERVOIRS DE FLUIDE IMAGEABLES PAR ÉLECTRONS OU POUR ÉCHANTILLONS CONDUCTEURS PLUS GRANDS
Abstract:
(EN) A heating device having a heating element patterned into a robust MEMs substrate, wherein the heating element is electrically isolated from a fluid reservoir or bulk conductive sample, but close enough in proximity to an imagable window/area having the fluid or sample thereon, such that the sample is heated through conduction. The heating device can be used in a microscope sample holder, e.g., for SEM, TEM, STEM, X-ray synchrotron, scanning probe microscopy, and optical microscopy.
(FR) On décrit un dispositif de chauffage comportant un élément chauffant façonné en un substrat MEMS robuste. L'élément chauffant est électriquement isolé d'un réservoir de fluide ou d'un échantillon conducteur en vrac, mais est suffisamment proche d'une fenêtre/zone imageable sur laquelle se trouve le fluide ou l'échantillon, de sorte que l'échantillon soit chauffé par conduction. Le dispositif de chauffage peut être utilisé dans un porte-échantillon de microscope, par exemple pour SEM, TEM, STEM, synchrotron aux rayons X, microscopie en champ proche, et microscopie optique.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)