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1. (WO2017040539) SUBSTRATE COMPRISING AN EMBEDDED INDUCTOR INCLUDING A THIN FILM MAGNETIC CORE

Pub. No.:    WO/2017/040539    International Application No.:    PCT/US2016/049512
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Wed Aug 31 01:59:59 CEST 2016
IPC: H01L 23/64
H01F 17/00
H01F 41/04
H01F 41/32
H05K 1/16
Applicants: QUALCOMM INCORPORATED
Inventors: YUN, Changhan Hobie
VELEZ, Mario Francisco
ZUO, Chengjie
KIM, Daeik Daniel
BERDY, David Francis
LAN, Je-Hsiung Jeffrey
KIM, Jonghae
MUDAKATTE, Niranjan Sunil
MIKULKA, Robert Paul
Title: SUBSTRATE COMPRISING AN EMBEDDED INDUCTOR INCLUDING A THIN FILM MAGNETIC CORE
Abstract:
A substrate includes a first dielectric layer, a magnetic core at least partially in the first dielectric layer, where the magnetic core comprises a first non-horizontal thin film magnetic (TFM) layer. The substrate also includes a first inductor that includes a plurality of first interconnects, where the first interconnects are positioned in the substrate to at least partially surround the magnetic core. The magnetic core may further include a second non-horizontal thin film magnetic (TFM) layer. The magnetic core may further include a core layer. The magnetic core may further include a third thin film magnetic (TFM) layer, and a fourth thin film magnetic (TFM) layer that is substantially parallel to the third thin film magnetic (TFM) layer.