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1. (WO2017040295) DIRECT THREE PHASE PARALLEL RESONANT INVERTER FOR REACTIVE GAS GENERATOR APPLICATIONS
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2017/040295 International Application No.: PCT/US2016/049017
Publication Date: 09.03.2017 International Filing Date: 26.08.2016
IPC:
H01J 37/32 (2006.01) ,H02M 5/22 (2006.01) ,H02M 5/257 (2006.01) ,H02M 5/27 (2006.01) ,H02M 5/275 (2006.01) ,H02M 5/293 (2006.01) ,H02M 5/297 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
M
APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
5
Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
02
without intermediate conversion into dc
04
by static converters
22
using discharge tubes with control electrode or semiconductor devices with control electrode
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
M
APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
5
Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
02
without intermediate conversion into dc
04
by static converters
22
using discharge tubes with control electrode or semiconductor devices with control electrode
25
using devices of a thyratron or thyristor type requiring extinguishing means
257
using semiconductor devices only
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
M
APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
5
Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
02
without intermediate conversion into dc
04
by static converters
22
using discharge tubes with control electrode or semiconductor devices with control electrode
25
using devices of a thyratron or thyristor type requiring extinguishing means
27
for conversion of frequency
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
M
APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
5
Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
02
without intermediate conversion into dc
04
by static converters
22
using discharge tubes with control electrode or semiconductor devices with control electrode
275
using devices of a triode or transistor type requiring continuous application of a control signal
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
M
APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
5
Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
02
without intermediate conversion into dc
04
by static converters
22
using discharge tubes with control electrode or semiconductor devices with control electrode
275
using devices of a triode or transistor type requiring continuous application of a control signal
293
using semiconductor devices only
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
M
APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
5
Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
02
without intermediate conversion into dc
04
by static converters
22
using discharge tubes with control electrode or semiconductor devices with control electrode
275
using devices of a triode or transistor type requiring continuous application of a control signal
297
for conversion of frequency
Applicants:
MKS INSTRUMENTS, INC. [US/US]; 2 Tech Drive Suite 201 Andover, Massachusetts 01810, US
Inventors:
TRAN, Ken; US
TIAN, Feng; US
Agent:
KNIGHT, Sarah; US
Priority Data:
14/843,41202.09.2015US
Title (EN) DIRECT THREE PHASE PARALLEL RESONANT INVERTER FOR REACTIVE GAS GENERATOR APPLICATIONS
(FR) ONDULEUR RÉSONANT TRIPHASÉ À COURANT CONTINU EN PARALLÈLE DESTINÉ À DES APPLICATIONS DE GÉNÉRATEUR DE GAZ RÉACTIF
Abstract:
(EN) A power system for a reactive gas generator (100) can include a direct three phase inverter (101). A resonant tank (102) can further be included to receive a square wave output of the direct three phase inverter and provide a sine wave output. The power system can include an inverter controller (103) that turns on and off selected switches of the direct three phase inverter based on states of the three phases of a three phase AC power supply, where a switch is turned on with an adaptive ON time and a modulated OFF time depending on a desired output power.
(FR) L'invention concerne un système d'alimentation de générateur de gaz réactif (100) pouvant comprendre un onduleur triphasé à courant continu (101). L'invention peut en outre faire appel à une cuve de résonance (102) servant à recevoir une sortie à onde carrée de l'onduleur triphasé à courant continu et à fournir une sortie à onde sinusoïdale. Le système d'alimentation peut comprendre un dispositif de commande (103) d'onduleur qui met en et hors circuit des commutateurs sélectionnés de l'onduleur triphasé à courant continu sur la base d'états des trois phases d'une alimentation en courant alternatif triphasé, un commutateur étant mis en circuit sur une durée adaptative de mise en circuit et hors circuit sur une durée modulée de mise hors circuit en fonction d'une puissance de sortie souhaitée.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)