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1. (WO2017040100) METHOD AND APPARATUS FOR PRESSURE-BASED FLOW MEASUREMENT IN NON-CRITICAL FLOW CONDITIONS
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Pub. No.: WO/2017/040100 International Application No.: PCT/US2016/048126
Publication Date: 09.03.2017 International Filing Date: 23.08.2016
IPC:
G01F 1/34 (2006.01) ,G01F 1/36 (2006.01) ,G05D 7/06 (2006.01)
G PHYSICS
01
MEASURING; TESTING
F
MEASURING VOLUME, VOLUME FLOW, MASS FLOW, OR LIQUID LEVEL; METERING BY VOLUME
1
Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow
05
by using mechanical effects
34
by measuring pressure or differential pressure
G PHYSICS
01
MEASURING; TESTING
F
MEASURING VOLUME, VOLUME FLOW, MASS FLOW, OR LIQUID LEVEL; METERING BY VOLUME
1
Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow
05
by using mechanical effects
34
by measuring pressure or differential pressure
36
the pressure or differential pressure being created by the use of flow constriction
G PHYSICS
05
CONTROLLING; REGULATING
D
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
7
Control of flow
06
characterised by the use of electric means
Applicants:
MKS INSTRUMENTS, INC. [US/US]; 2 Tech Drive Andover, MA 01810, US
Inventors:
DING, Junhua; US
L'BASSI, Michael; US
Agent:
MCCLOSKEY, G., Matthew; US
Priority Data:
62/212,21231.08.2015US
Title (EN) METHOD AND APPARATUS FOR PRESSURE-BASED FLOW MEASUREMENT IN NON-CRITICAL FLOW CONDITIONS
(FR) PROCÉDÉ ET APPAREIL POUR MESURE DE DÉBIT BASÉE SUR LA PRESSION DANS DES CONDITIONS D'ÉCOULEMENT NON CRITIQUE
Abstract:
(EN) Methods, systems, and apparatus for pressure-based flow measurement are provided. A processor receives, from the pressure-based mass flow controller (MFC), an upstream pressure value Pu. The processor computes, for the pressure-based mass flow controller (MFC), a downstream pressure value Pd based on the received upstream pressure value Pu. The processor computes, for the pressure-based mass flow controller (MFC), a flow rate Q based on the received upstream pressure value Pu and the computed downstream pressure value Pd.The processor controls a flow through the pressure-based mass flow controller (MFC) based on the computed flow rate Q. The methods, systems, and apparatus can be used for flow measurement in non-critical or un-choked flow conditions.
(FR) L'invention porte sur des procédés, sur des systèmes et sur un appareil pour une mesure de débit basée sur la pression. Un processeur reçoit, en provenance d'un régulateur de débit massique (MFC) basé sur la pression, une valeur de pression amont P u . Le processeur calcule, pour le régulateur de débit massique (MFC) basé sur la pression, une valeur de pression aval P d basée sur la valeur de pression amont P u reçue. Le processeur calcule, pour le régulateur de débit massique (MFC) basé sur la pression, un débit Q basé sur la valeur de pression amont P u reçue et sur la valeur de pression aval P d calculée. Le processeur régule un écoulement à travers le régulateur de débit massique (MFC) basé sur la pression en fonction du débit Q calculé. Les procédés, les systèmes et l'appareil peuvent être utilisés pour une mesure de débit dans des conditions d'écoulement non critique ou non réduit.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)