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1. (WO2017039959) LINE EDGE ROUGHNESS REDUCTION VIA STEP SIZE ALTERATION

Pub. No.:    WO/2017/039959    International Application No.:    PCT/US2016/045959
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Tue Aug 09 01:59:59 CEST 2016
IPC: G03F 7/20
Applicants: APPLIED MATERIALS, INC.
Inventors: LAIDIG, Thomas L.
JOHNSON, Joseph
BENCHER, Christopher Dennis
Title: LINE EDGE ROUGHNESS REDUCTION VIA STEP SIZE ALTERATION
Abstract:
An image correction application relating to the ability to apply maskless lithography patterns to a substrate in a manufacturing process is disclosed. The embodiments described herein relate to a software application platform, which corrects non-uniform image patterns on a substrate. The application platform method includes disabling at least one entire column of mirrors in the DMD, wherein the DMD has a plurality of columns each column having a plurality of mirrors, exposing a first portion of the substrate to a first shot of electromagnetic radiation, exposing a second portion of the substrate to a second shot of electromagnetic radiation, and repeating exposing a second portion of the substrate to a second shot until the substrate is fully processed.