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1. (WO2017039674) DEFECT FREE HETEROGENEOUS SUBSTRATES

Pub. No.:    WO/2017/039674    International Application No.:    PCT/US2015/048365
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Fri Sep 04 01:59:59 CEST 2015
IPC: H01L 21/20
Applicants: HEWLETT PACKARD ENTERPRISE DEVELOPMENT LP
Inventors: LIANG, Di
Title: DEFECT FREE HETEROGENEOUS SUBSTRATES
Abstract:
In example implementations of a heterogeneous substrate, the heterogeneous substrate includes a first material having an air trench, a second material coupled to the first material, a dielectric mask on a first portion of the second material and an active region that is grown on a remaining portion of the second material. An air gap may be formed in the air trench by the second material coupled to the first material. Defects in the second material may be contained to an area below the dielectric mask and the active region may remain defect free.